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Desktop Single Target Magnetron Sputtering Coater with Reciprocating Sample Table for Coating Single Or Multiple Film Layers

Desktop single target magnetron sputtering coater can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory
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  • TN-MSP300S-DCRF

  • TN

The Desktop Single Target Magnetron Sputtering Coater with Reciprocating Sample Table is a highly efficient and versatile tool for coating single-layer or multi-layer ferroelectric thin films, conductive films, and alloy films.


This professional-grade coater is designed to deliver exceptional performance and precision in a compact desktop size. With its advanced magnetron sputtering technology, it offers a reliable and efficient method for depositing thin films onto a variety of substrates.


The reciprocating sample table ensures uniform coating distribution and allows for precise control over the deposition process. This feature is particularly useful when coating single samples, as it guarantees consistent results across the entire surface.


Whether you are conducting research, developing new materials, or manufacturing electronic devices, this desktop coater is an essential tool for your laboratory or production facility. Its user-friendly interface and intuitive controls make it easy to operate, while its robust construction ensures long-lasting performance.


Invest in the Desktop Single Target Magnetron Sputtering Coater with Reciprocating Sample Table and experience the benefits of high-quality thin film coatings. Achieve superior film adhesion, excellent uniformity, and precise control over film thickness. Take your coating capabilities to the next level with this professional-grade magnetron sputtering coater.

Technical parameters of single target magnetron sputtering coater:

Reciprocating sample table

size

50*100mm

Reciprocating   speed

0~50mm/s

Magnetron target gun

Target   plane

Circular flat target

Sputtering   vacuum

10Pa~0.2Pa

Target   diameter

2 inches

Target   thickness

Recommended 2 ~ 5mm

Target   temperature

≦65℃

Vacuum chamber

Cavity   size

About   Φ180mm × H 215mm

Cavity   material

High   purity quartz

Observation   window

Omnidirectional   transparency

Opening   method

Removable   top cover

power supply

DC   power supply

150W max

Quantity

1

Molecular pump system

Foreline   pump



Rotary   vane pump

VRD-4

Pumping   speed

1.1L/S

Ultimate   vacuum

5*10-1Pa

Molecular   pump

Molecular   pumping speed

600L/S

Rated   speed

24000rpm

Ultimate   vacuum

5*10-5Pa

Vibration   value

≦0.1um

Start   Time

≦4.5min

Downtime

<7min

cooling   method

Water cooling + air cooling

Water cooler

Cooling   water temperature

≦37℃

Cooling   water flow rate

10L/min

Supply voltage

AC220V 50Hz


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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