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TN-MSP180S-DC-GU
TN
The Desktop Single Target Magnetron Sputtering Coater with Tiltable Sample Stage for Oxide Films is a professional-grade product designed for precision film preparation. With its advanced technology and versatile features, this coater is perfect for creating single-layer or multi-layer ferroelectric thin films, conductive films, and alloy films.
Featuring a compact desktop design, this coater is suitable for laboratory and research applications. Its single target magnetron sputtering system ensures uniform and controlled film deposition, allowing for precise and reproducible results. The tiltable sample stage further enhances the coating process by providing flexibility in film thickness and composition.
With this coater, you can achieve high-quality oxide films with excellent adhesion and uniformity. Whether you are conducting experiments, developing new materials, or manufacturing electronic devices, this coater is a reliable and efficient tool that meets professional standards
magnetron sputtering coater technical parameters：
TN-MSP180S-DC-GU | ||||
Sample stage | Size | Φ60mm | Rotating speed | 0-20 adjustable |
Magnetron sputtering target | Quantity | 2” x1 | ||
Vacuum chamber | Chamber size | Φ180mm x 150mm | Observation window | Omnidirectional visibility |
Chamber material | High purity quartz | Opening method | Top cover removable | |
Lower flange | Including sample table tilt mechanism and rotation mechanism | |||
Vacuum system | Mechanical pump | Two-stage rotary vane pump | Pumping interface | KF16 |
Molecular pump | Turbomolecular pump | Pumping interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | Exhaust interface | KF40 | |
Ultimate vacuum | 1.0E-3Pa | Power supply | AC 220V 50/60Hz | |
Pumping rate | Backing pump: 1.1L/s Molecular pump: 60L/S | |||
Power configuration | Quantity | DC power supply x1 | Maximum output power | DC power supply 300W |
Other | Supply voltage | AC220V, 50Hz | Dimensions | 500mm x 320mm x620mm |
Total power | 2kW | |||
The Desktop Single Target Magnetron Sputtering Coater with Tiltable Sample Stage for Oxide Films is a professional-grade product designed for precision film preparation. With its advanced technology and versatile features, this coater is perfect for creating single-layer or multi-layer ferroelectric thin films, conductive films, and alloy films.
Featuring a compact desktop design, this coater is suitable for laboratory and research applications. Its single target magnetron sputtering system ensures uniform and controlled film deposition, allowing for precise and reproducible results. The tiltable sample stage further enhances the coating process by providing flexibility in film thickness and composition.
With this coater, you can achieve high-quality oxide films with excellent adhesion and uniformity. Whether you are conducting experiments, developing new materials, or manufacturing electronic devices, this coater is a reliable and efficient tool that meets professional standards
magnetron sputtering coater technical parameters：
TN-MSP180S-DC-GU | ||||
Sample stage | Size | Φ60mm | Rotating speed | 0-20 adjustable |
Magnetron sputtering target | Quantity | 2” x1 | ||
Vacuum chamber | Chamber size | Φ180mm x 150mm | Observation window | Omnidirectional visibility |
Chamber material | High purity quartz | Opening method | Top cover removable | |
Lower flange | Including sample table tilt mechanism and rotation mechanism | |||
Vacuum system | Mechanical pump | Two-stage rotary vane pump | Pumping interface | KF16 |
Molecular pump | Turbomolecular pump | Pumping interface | KF40 | |
Vacuum measurement | Resistance gauge + ionization gauge | Exhaust interface | KF40 | |
Ultimate vacuum | 1.0E-3Pa | Power supply | AC 220V 50/60Hz | |
Pumping rate | Backing pump: 1.1L/s Molecular pump: 60L/S | |||
Power configuration | Quantity | DC power supply x1 | Maximum output power | DC power supply 300W |
Other | Supply voltage | AC220V, 50Hz | Dimensions | 500mm x 320mm x620mm |
Total power | 2kW | |||
