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Desktop Planetary Single Target Magnetron Sputtering Coater for ITO Indium Tin Oxide Film Glass Coating Machine

Desktop Planetary target Magnetron Sputtering Coater can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory
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  • TN-MSP180G-PST

  • TN

Introducing our Desktop Planetary Single Target Magnetron Sputtering Coater, the ultimate solution for precise and efficient coating of ITO Indium Tin Oxide Film Glass. Designed with professionalism in mind, this cutting-edge coater offers unparalleled performance and versatility.


Equipped with advanced technology, our planetary single target magnetron sputtering coater enables the preparation of high-quality single-layer or multi-layer ferroelectric thin films, conductive films, and alloy films. Whether you require a single-layer coating or a complex multi-layer structure, our coater ensures exceptional uniformity and accuracy throughout the process.


With its compact desktop design, this coater is perfect for laboratories, research facilities, and small-scale production environments. Its user-friendly interface and intuitive controls make it easy to operate, even for those new to sputtering technology. Our coater guarantees precise control over the deposition parameters, allowing you to achieve the desired thickness, composition, and morphology of your films with utmost precision.


Not only does our coater deliver exceptional performance, but it also boasts remarkable durability and reliability. Crafted from high-quality materials and engineered to the highest standards, this coater ensures long-lasting operation and minimal maintenance requirements. Its robust construction guarantees stable and consistent performance, enabling you to achieve consistent results time after time.


Invest in our Desktop Planetary Single Target Magnetron Sputtering Coater for unparalleled coating capabilities and unmatched efficiency. Whether you are working on research projects, academic studies, or industrial applications, this coater will undoubtedly elevate your work to new heights. Experience the power of precise and efficient film coating with our top-of-the-line coater.


Technical parameters of planetary single target magnetron sputtering coater:

TN-MSP180G-PST (Planetary   sample table) single target magnetron sputtering coater

Sample   stage

Size

φ50mm   x4

Rotation   speed

The   revolution speed is adjustable from 0-10rpm, and the revolution and rotation   speed ratio is 1:5

Magnetron   sputtering target

Quantity

2”   x1



Vacuum   chamber

Chamber   size

Φ180mm   x 100mm

Observation   window

Omnidirectional   visibility

Chamber   material

High   purity quartz

Opening   method

Top   cover removable

Lower   flange

Contains   planetary transmission mechanism, welded vacuum interface and intake valve

Vacuum   system

Mechanical   pump

Two-stage   rotary vane pump

Pumping   interface

KF16

Molecular   pump

Turbomolecular   pump

Pumping   interface

KF40

Vacuum   measurement

Resistance   gauge + ionization gauge

Exhaust   interface

KF40

Ultimate   vacuum

1.0E-3Pa

Power   supply

AC   220V 50/60Hz

Pumping   rate

Backing   pump:1.1L/s Molecular pump: 60L/S

Power   configuration

Quantity

DC   power supply x1

Maximum   output power

DC   power supply 300W

Other

Supply   voltage

AC220V,   50Hz

Overall   size

500mm   x 320mm x620mm

Total   power

2kW





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