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MSD series power DC magnetron sputtering power supply

C magnetron sputtering power supply is a common thin film preparation technology. Its application fields include but are not limited to:Manufacturing of metal compound thin film materials,Optical field,Electronic component manufacturing
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  • TN

MSD series DC magnetron sputtering power supply

Main features:

1. It uses advanced current-mode switching power supply technology to reduce output energy storage components. At the same time, it improves the suppression of sparking and restart speed, and the advantage of coating on aluminum target is more obvious.

2. It is available in constant current/constant power mode. The constant power mode guarantees the repeatability of the coating process compared to the conventional constant current mode.

3. It has an ideal voltage steep drop characteristic, automatically recognizes the phenomenon of pseudo-ignition, and fully satisfies the continuity of the magnetron sputtering process.

4. Main parameters can be adjusted in a wide range

5. Optional manual control / analog interface control, optional RS485 communication interface.

6. It uses imported high power IGBT & MOS module, use advanced PWM pulse width modulation technology, and use imported IGBT or MOSFET as power switching device. It is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.

This series of products uses advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.

This series of products has excellent load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;

The main parameters can be continuously adjusted in a wide range;

Easy maintenance and high reliability;

PLC interface and RS485 interface expansion function, easy to achieve automatic control.

DC magnetron sputtering power supply is a common thin film preparation technology. Its application fields include but are not limited to:


Manufacturing of metal compound thin film materials: DC magnetron sputtering technology can be used to manufacture various metal compound thin film materials, which can be used to prepare various metal parts, molds and electronic components. For example, it can manufacture metal wires, electrodes, metal films, nanowires, and magnetoelectric devices. These materials are widely used in industry, electronics, and biomedicine.

Optical field: DC magnetron sputtering technology can be used to manufacture various optical films, such as anti-reflection coatings, reflective films, filters, etc. These films are widely used in optical instruments, lighting, photography and other fields.

Solar panel manufacturing: DC magnetron sputtering technology can be used to manufacture solar panels, which can convert light energy into electrical energy when illuminated by sunlight.

Decoration and construction fields: DC magnetron sputtering technology can be used to produce various decorative films, such as coated glass, plastic films, etc. These materials can be used for exterior decoration and interior decoration of buildings.

Electronic component manufacturing: DC magnetron sputtering technology can be used to manufacture various electronic components, such as resistors, capacitors, inductors, etc. These components play an important role in electronic equipment.



Technical parameters:

Model

Power   (kW)

Max   work current (A)

Dimensions

Cooling   method

No-load   voltage (V)

Working   voltage (V)

MSD-10k

10

12.5

1   unit

Air cooling

480*243*565

(WHD) (3U)

1000

150~800V

MSD-20k

20

25

1   unit

MSD-30k

30

37.5

2   units

MSD-40k

40

50

2   units

MSD-20k

20

25

1   unit

Air cooling and water   cooling

480*280*580

(WHD)(3U)

1000

150~800V

MSD-30k

30

37.5

1   unit

MSD-40k

40

50

1   unit

MSD-60k

60

75

2   units

MSD-80k

80

100

2   units

MSD-100k

100

125

3   units

MSD-120k

120

150

3   units


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Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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