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TN
Bias power supply is mainly used for multi-arc ion plating, magnetic filter arc ion plating, DC magnetron sputtering coating,
Unbalanced magnetron sputtering coating and twin target medium frequency magnetron sputtering coating, plasma enhanced chemical vapor deposition (PECVD), and the like.
The main functions include: glow discharge cleaning on the surface of the workpiece to be plated, ion bombardment before coating, and ion acceleration during coating.
Reasonable selection of bias power supply can effectively suppress the surface of the workpiece from igniting, and significantly improve the yield, surface finish and film-based bonding force of the plated parts.
Brand | TN |
Model | BD series DC bias power supply |
Phase number | Three phases + N |
Input voltage | 380V |
Frequency | 50HZ |
Input method | 4 lines (including zero line) |
Output waveform | Pulse |
Power | 10KW—100KW (customizable) |
Voltage | 0—1200V (customizable) |
Current | 0-100A (customizable) |
Stability | ≤1% |
Ripple & Noise | ≤2% |
power | ≥90% |
Control method | Constant voltage, high and low voltage switching |
Control interface | Optional: panel manual, PLC analog interface, RS485 (Modbus) |
Protection | With phase loss, overheating, voltage limiting, overvoltage, overcurrent, short circuit, overload and other protection functions |
Cooling method | Air or water cooling |
Protection level | IP21 |
Dimensions (W*D*H) | Power supply: 440 (W) ×260 (H) ×580 (D) (20KW air-cooled) Panel: 482 (W)×280 (H) |
The working voltage can be divided into A or B grades. The voltage in each grade is continuously adjustable and automatically regulated. The voltage stabilization accuracy is 1%F.S
A: 100V-1000V
B: 50V-500V
Bias power supply is mainly used for multi-arc ion plating, magnetic filter arc ion plating, DC magnetron sputtering coating,
Unbalanced magnetron sputtering coating and twin target medium frequency magnetron sputtering coating, plasma enhanced chemical vapor deposition (PECVD), and the like.
The main functions include: glow discharge cleaning on the surface of the workpiece to be plated, ion bombardment before coating, and ion acceleration during coating.
Reasonable selection of bias power supply can effectively suppress the surface of the workpiece from igniting, and significantly improve the yield, surface finish and film-based bonding force of the plated parts.
Brand | TN |
Model | BD series DC bias power supply |
Phase number | Three phases + N |
Input voltage | 380V |
Frequency | 50HZ |
Input method | 4 lines (including zero line) |
Output waveform | Pulse |
Power | 10KW—100KW (customizable) |
Voltage | 0—1200V (customizable) |
Current | 0-100A (customizable) |
Stability | ≤1% |
Ripple & Noise | ≤2% |
power | ≥90% |
Control method | Constant voltage, high and low voltage switching |
Control interface | Optional: panel manual, PLC analog interface, RS485 (Modbus) |
Protection | With phase loss, overheating, voltage limiting, overvoltage, overcurrent, short circuit, overload and other protection functions |
Cooling method | Air or water cooling |
Protection level | IP21 |
Dimensions (W*D*H) | Power supply: 440 (W) ×260 (H) ×580 (D) (20KW air-cooled) Panel: 482 (W)×280 (H) |
The working voltage can be divided into A or B grades. The voltage in each grade is continuously adjustable and automatically regulated. The voltage stabilization accuracy is 1%F.S
A: 100V-1000V
B: 50V-500V