BP series pulse bias power supply For Magnetron Sputtering

BP series pulse bias power supply

Main features:

1. It has the function of stabilizing voltage and has an ideal voltage steep drop characteristic, which effectively suppresses ignition of the workpiece surface, and significantly improves the yield, surface finish and film adhesion of the plated parts.

2. By appropriately adjusting the duty ratio, the film formation speed and temperature can be improved and controlled, the film bonding force is increased, and the deposition rate is increased.

3. It is divided into two files: high pressure and low pressure. The high pressure is suitable for glow cleaning and ion bombardment. The low pressure is suitable for ion acceleration during coating.

4. Frequency 40kHz, duty cycle 20%~80%.

5. Optional manual control / analog interface control, optional RS485 communication interface.

Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.

This series of products uses advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.

This series of products has the excellent load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;

The main parameters can be continuously adjusted in a wide range;

Easy maintenance and high reliability;

PLC interface and RS485 interface expansion function, easy to achieve automatic control.

Technical parameters: