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Electromagnetic Multi-waveform Power Supply for Magnetron Sputtering Coater

Unbalanced magnetron sputtering coating and twin target medium frequency magnetron sputtering coating, plasma enhanced chemical vapor deposition (PECVD), and the like
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  • TN

Multi wave power supply

Main feature:

1. You can choose three kinds of waveforms: triangular wave, rectangular wave and sine wave. The highest and lowest values of the waveform can be set independently.

2. Output voltage range: -40V~+40V.

3. Waveform frequency range: 0.1-50Hz

4. Triangle wave, rectangular wave duty cycle 10%~90%

5. Optional manual control / analog interface control, optional RS485 communication interface.

Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.

This series of products adopts advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.

This series of products has the excellent load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;

The main parameters can be continuously adjusted in a wide range;

Easy maintenance and high reliability;

PLC interface and RS485 interface expansion function, easy to achieve automatic control.

Technical parameters:

Model

Power   (W)

Working   voltage (V)

Maximum   peak current (A)

Dimensions

Cooling   method

MS-10A

400W

-40~+40

-10~+10

482*175*550

(WHD)[4U]

Air   cooling

MS-20A

800W

-40~+40

-20~+20

MS-30A

1200W

-40~+40

-30~+30


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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