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Ion Source Power Supply for Vacuum Coating

Unbalanced magnetron sputtering coating and twin target medium frequency magnetron sputtering coating, plasma enhanced chemical vapor deposition (PECVD), and the like
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  • TN

Main features:

1. It has the function of stabilizing voltage and has an ideal voltage steep drop characteristic, which effectively suppresses ignition of the source surface of the ion source.

2. DC superimposed pulse output, the peak can reach 2000V.

3. Frequency 40kHz, duty cycle 45%~90%.

4. Optional manual control / analog interface control, optional RS485 communication interface.

Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.

This series of products adopts advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit. This series of products has the excellent load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;

The main parameters can be continuously adjusted in a wide range;

Easy maintenance and high reliability;

PLC interface and RS485 interface expansion function, easy to achieve automatic control.

The application range of ion source power supply is very wide, mainly including the following aspects:


Ion mass spectrometry: The ion source power supply is one of the key devices of the ion mass spectrometer, which can be used to provide ionization energy and electron energy for electron bombardment.

Photoelectron spectroscopy: The ion source power supply can also be used for the study of photoelectron spectroscopy, which can provide the required ionization energy.

Electroplating and surface treatment: Ion source power can be used to generate ion beams for electroplating and surface treatment, which are efficient and high-quality.

Plasma research: Ion source power can be used for plasma research, such as spark discharge, etc., as well as cancer treatment in the medical field.

Vacuum coating: The application of ion source power supply in vacuum coating mainly includes surface cleaning, surface modification and film deposition.

In short, ion source power supplies are widely used in many fields and are an indispensable part of many equipment.



Technical features:

Model

Power   (W)

Working   peak voltage (V)

Maximum   operating current (A)

Mainframe   dimensions

Cooling   method

ISDP2000V

700

2kV

0.35A

482*175*550

(WHD)[4U]

Air   cooling


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