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MSB medium frequency magnetron sputtering vacuum coating power supply
Main features:
1. It uses advanced current-mode switching power supply technology to reduce output energy storage components. At the same time, it improves the suppression of sparking and restart speed, and the advantage of coating on aluminum target is more obvious.
2. It is available in constant current/constant power mode. The constant power mode guarantees the repeatability of the coating process compared to the conventional constant current mode.
3. It has an ideal voltage steep drop characteristic, automatically recognizes the phenomenon of pseudo-ignition, and fully satisfies the continuity of the magnetron sputtering process.
4. Main parameters can be adjusted in a wide range
5. Optional manual control / analog interface control, optional RS485 communication interface.
Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.
This series of products uses advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.
This series of products has load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;
The main parameters can be continuously adjusted in a wide range;
Easy maintenance and high reliability;
PLC interface and RS485 interface expansion function, easy to achieve automatic control.
Technical parameters:
Model | Power (kW) | Max work current (A) | Dimensions | Cooling method | No-load voltage (V) | Working voltage (V) |
MSB-10k | 10 | 12.5 | 1 unit | Air cooling | 1000 | 150~800V |
MSB-20k | 20 | 25 | 1 unit | |||
MSB-30k | 30 | 37.5 | 2 units | |||
MSB-40k | 40 | 50 | 2 units | |||
MSB-20k | 20 | 25 | 1 unit | Air cooling and water cooling | 1000 | 150~800V |
MSB-30k | 30 | 37.5 | 1 unit | |||
MSB-40k | 40 | 50 | 1 unit | |||
MSB-60k | 60 | 75 | 2 units | |||
MSB-80k | 80 | 100 | 2 units | |||
MSB-100k | 100 | 125 | 3 units | |||
MSB-120k | 120 | 150 | 3 units |
MSB medium frequency magnetron sputtering vacuum coating power supply
Main features:
1. It uses advanced current-mode switching power supply technology to reduce output energy storage components. At the same time, it improves the suppression of sparking and restart speed, and the advantage of coating on aluminum target is more obvious.
2. It is available in constant current/constant power mode. The constant power mode guarantees the repeatability of the coating process compared to the conventional constant current mode.
3. It has an ideal voltage steep drop characteristic, automatically recognizes the phenomenon of pseudo-ignition, and fully satisfies the continuity of the magnetron sputtering process.
4. Main parameters can be adjusted in a wide range
5. Optional manual control / analog interface control, optional RS485 communication interface.
Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.
This series of products uses advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.
This series of products has load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;
The main parameters can be continuously adjusted in a wide range;
Easy maintenance and high reliability;
PLC interface and RS485 interface expansion function, easy to achieve automatic control.
Technical parameters:
Model | Power (kW) | Max work current (A) | Dimensions | Cooling method | No-load voltage (V) | Working voltage (V) |
MSB-10k | 10 | 12.5 | 1 unit | Air cooling | 1000 | 150~800V |
MSB-20k | 20 | 25 | 1 unit | |||
MSB-30k | 30 | 37.5 | 2 units | |||
MSB-40k | 40 | 50 | 2 units | |||
MSB-20k | 20 | 25 | 1 unit | Air cooling and water cooling | 1000 | 150~800V |
MSB-30k | 30 | 37.5 | 1 unit | |||
MSB-40k | 40 | 50 | 1 unit | |||
MSB-60k | 60 | 75 | 2 units | |||
MSB-80k | 80 | 100 | 2 units | |||
MSB-100k | 100 | 125 | 3 units | |||
MSB-120k | 120 | 150 | 3 units |