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MSB Medium Frequency Magnetron Sputtering Vacuum Coating Power Supply

Unbalanced magnetron sputtering coating and twin target medium frequency magnetron sputtering coating, plasma enhanced chemical vapor deposition (PECVD), and the like
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  • TN

MSB medium frequency magnetron sputtering vacuum coating power supply

Main features:

1. It uses advanced current-mode switching power supply technology to reduce output energy storage components. At the same time, it improves the suppression of sparking and restart speed, and the advantage of coating on aluminum target is more obvious.

2. It is available in constant current/constant power mode. The constant power mode guarantees the repeatability of the coating process compared to the conventional constant current mode.

3. It has an ideal voltage steep drop characteristic, automatically recognizes the phenomenon of pseudo-ignition, and fully satisfies the continuity of the magnetron sputtering process.

4. Main parameters can be adjusted in a wide range

5. Optional manual control / analog interface control, optional RS485 communication interface.

Using advanced PWM pulse width modulation technology, using imported IGBT or MOSFET as power switching device, it is small in size, light in weight, full in function, stable and reliable in performance, and the production process is strict and perfect.

This series of products uses advanced DSP control system to fully ensure the repeatability of the coating process, and has the function of restraining target arcing discharge and resisting short circuit.

This series of products has load matching capability, which not only ensures the stability of the target surface cleaning process, but also improves the target surface cleaning speed;

The main parameters can be continuously adjusted in a wide range;

Easy maintenance and high reliability;

PLC interface and RS485 interface expansion function, easy to achieve automatic control.

Technical parameters:

Model

Power   (kW)

Max   work current (A)

Dimensions

Cooling   method

No-load   voltage (V)

Working   voltage (V)

MSB-10k

10

12.5

1   unit

Air cooling

1000

150~800V

MSB-20k

20

25

1   unit

MSB-30k

30

37.5

2   units

MSB-40k

40

50

2   units

MSB-20k

20

25

1   unit

Air cooling and   water cooling

1000

150~800V

MSB-30k

30

37.5

1   unit

MSB-40k

40

50

1   unit

MSB-60k

60

75

2   units

MSB-80k

80

100

2   units

MSB-100k

100

125

3   units

MSB-120k

120

150

3   units


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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