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Dual Target Magnetron Sputter And Thermal Evaporation Composite Coating Machine

magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).

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Model:
TN-MS500S-2TA1S
Brand:
TN

magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).

The equipment is mainly composed of stainless steel vacuum chamber, magnetron sputtering target, evaporation source, rotary heating sample table, vacuum pump unit, vacuum measurement gauge, air intake system and control system.

Technical parameter

Model	TN-MS500S-2TA1S
Sample table	Size	150mm Dia.	Heating	≤500℃
	Rotation speed	1-20r/min	Temp control	±1℃
Magnetron sputter head	Quantity	2-inch ×2	Cooling mode	Water cooled
Thermal evaporation	evaporator source	Tungsten wire basket	Max temp	1500℃
Thermal evaporation	Thermocouple	S type
Vacuum chamber	Size	300mmDia.× 300mmH	Watch window	100mm Dia.
Vacuum chamber	Material	304 SUS	Open mode	Front opening door
Vacuum system	Mechanical pump	Rotary vane pump	Extraction interface	KF16
	Pumping	1.1L/s
	Molecular pump	Turbo molecular pump	Extraction interface	CF150
	Pumping	600L/s	Exhaust interface	KF40
	Vacuum gauge	Resistance gauge + ionization gauge
	Ultimate vacuum degree	1.3x10-4Pa	Power supply	AC;220V 50/60Hz
Sputter power supply	DC power supply	1 set	Output power	≤1000W
	Output voltage	≤600W	Response time	＜5ms
	RF power supply	1 set	Output power	≤1000W
	Power stability	≤5W
	RF frequency	13.56MHz	RF stability	±0.005%
Film thickness gauge	Resolution	±0.03Hz	Accuracy	±0.5%
Film thickness gauge	Upper range limit	50000	Speed	100~1000ms
Water cooled system	Tank volume	9L	Flow	10L/min
Gas system	Flowmeter type	MFC(mass flow meter)	Range	200sccm
Gas system	Gas type	Ar
Other	Input supply	AC220V,50Hz	Size	1400x750x1300mm
Other	Total power	4kw（host+vacuum pump）	Weight	295kg

New sample table is available

Sample	Size	For Dia.150mm sample max.	Height	70mm adjustable
	Rotation speed	1~20rpm	Heating	0~500℃

The Dual Target Magnetron Sputter and Thermal Evaporation Composite Coating Machine is a state-of-the-art solution designed for advanced coating applications. One of its standout features is the intuitive touch screen operation, complemented by a temperature control meter for precise detection. This digital parameter interface and automatic operation mode provide users with an exceptional platform for research and development, streamlining the process of coating materials and enhancing productivity.

Constructed with a vacuum chamber made of 304 stainless steel, this machine boasts an aesthetically pleasing design along with fine craftsmanship. The chamber includes an observation window and a baffle, allowing users to monitor the coating process effectively. The main sealing flange is a CF series high vacuum sealing flange, ensuring superior vacuum performance. Each interface of the vacuum chamber is sealed with a durable rubber seal ring, which significantly contributes to maintaining the vacuum integrity and, consequently, the quality of the coatings produced.

In terms of functionality, the machine features a unique target arrangement where the target is positioned at the bottom of the cavity, facing upwards. This design is paired with a sample table that can heat and rotate, facilitating a more uniform coating effect across different substrates. This capability is essential for achieving consistent results, especially in complex coating processes.

The vacuum acquisition system is another highlight, utilizing a two-stage vacuum pump group. The backing pump is a high-speed mechanical pump that efficiently reduces the time required to transition from atmospheric pressure to low vacuum. The main pump, a turbine molecular pump, enhances this process with its high pumping speed, ensuring rapid vacuum acquisition. Together, these components create a clean and efficient vacuum environment, which is critical for achieving high-quality coatings in various applications. Overall, this machine represents a significant advancement in coating technology, combining user-friendly features with robust performance.