| Quantity: | |
|---|---|
TN-MS500S-2TA1S
TN
magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).
The equipment is mainly composed of stainless steel vacuum chamber, magnetron sputtering target, evaporation source, rotary heating sample table, vacuum pump unit, vacuum measurement gauge, air intake system and control system.
Features
a. Touch screen operation, temperature control meter detection. Digital parameter interface and automatic operation mode provide users with an excellent research and development platform;
b. The vacuum chamber is made of 304 stainless steel with observation window and baffle. Beautiful shape, fine workmanship, excellent vacuum performance. The main sealing flange is CF series high vacuum sealing flange. Each interface of vacuum chamber is sealed with rubber seal ring, which has excellent vacuum performance and can effectively ensure the coating quality;
c. The target is located at the bottom of the cavity, and the target is upward. The sample table has the function of heating and rotating, which can make the coating effect more uniform;;
d. The vacuum acquisition system adopts two-stage vacuum pump group. The backing pump is mechanical pump with high pumping speed, which can effectively reduce the time from atmospheric pressure to low vacuum. The main pump is turbine molecular pump, which has high pumping speed and faster vacuum acquisition speed. The overall vacuum acquisition system is clean and fast.
Technical parameter
Model | TN-MS500S-2TA1S | |||
Sample table | Size | Heating | ≤500℃ | |
Rotation speed | 1-20r/min | Temp control | ±1℃ | |
Magnetron sputter head | Quantity | 2-inch ×2 | Cooling mode | Water cooled |
Thermal evaporation | evaporator source | Tungsten wire basket | Max temp | 1500℃ |
Thermocouple | S type | |||
Vacuum chamber | Size | 300mmDia.× 300mmH | Watch window | 100mm Dia. |
Material | 304 SUS | Open mode | Front opening door | |
Vacuum system | Mechanical pump | Rotary vane pump | Extraction interface | KF16 |
Pumping | 1.1L/s | |||
Molecular pump | Turbo molecular pump | Extraction interface | CF150 | |
Pumping | 600L/s | Exhaust interface | KF40 | |
Vacuum gauge | Resistance gauge + ionization gauge | |||
Ultimate vacuum degree | 1.3x10-4Pa | Power supply | AC;220V 50/60Hz | |
DC power supply | 1 set | Output power | ≤1000W | |
Output voltage | ≤600W | Response time | ＜5ms | |
RF power supply | 1 set | Output power | ≤1000W | |
Power stability | ≤5W | |||
RF frequency | 13.56MHz | RF stability | ±0.005% | |
Film thickness gauge | Resolution | ±0.03Hz | Accuracy | ±0.5% |
Upper range limit | 50000 | Speed | 100~1000ms | |
Water cooled system | Tank volume | 9L | Flow | 10L/min |
Gas system | Flowmeter type | MFC(mass flow meter) | Range | 200sccm |
Gas type | Ar | |||
Other | Input supply | AC220V,50Hz | Size | 1400x750x1300mm |
Total power | 4kw（host+vacuum pump） | Weight | 295kg | |
New sample table is available
Sample | Size | For Dia.150mm sample max. | Height | 70mm adjustable |
Rotation speed | 1~20rpm | Heating | 0~500℃ |
magnetron sputter & thermal evaporation two-in-one coating machine can be used for the coating of electronic products, glass, ceramic samples, metal and other samples, especially suitable for sample preparation of laboratory SEM (scanning electron microscope).
The equipment is mainly composed of stainless steel vacuum chamber, magnetron sputtering target, evaporation source, rotary heating sample table, vacuum pump unit, vacuum measurement gauge, air intake system and control system.
Features
a. Touch screen operation, temperature control meter detection. Digital parameter interface and automatic operation mode provide users with an excellent research and development platform;
b. The vacuum chamber is made of 304 stainless steel with observation window and baffle. Beautiful shape, fine workmanship, excellent vacuum performance. The main sealing flange is CF series high vacuum sealing flange. Each interface of vacuum chamber is sealed with rubber seal ring, which has excellent vacuum performance and can effectively ensure the coating quality;
c. The target is located at the bottom of the cavity, and the target is upward. The sample table has the function of heating and rotating, which can make the coating effect more uniform;;
d. The vacuum acquisition system adopts two-stage vacuum pump group. The backing pump is mechanical pump with high pumping speed, which can effectively reduce the time from atmospheric pressure to low vacuum. The main pump is turbine molecular pump, which has high pumping speed and faster vacuum acquisition speed. The overall vacuum acquisition system is clean and fast.
Technical parameter
Model | TN-MS500S-2TA1S | |||
Sample table | Size | Heating | ≤500℃ | |
Rotation speed | 1-20r/min | Temp control | ±1℃ | |
Magnetron sputter head | Quantity | 2-inch ×2 | Cooling mode | Water cooled |
Thermal evaporation | evaporator source | Tungsten wire basket | Max temp | 1500℃ |
Thermocouple | S type | |||
Vacuum chamber | Size | 300mmDia.× 300mmH | Watch window | 100mm Dia. |
Material | 304 SUS | Open mode | Front opening door | |
Vacuum system | Mechanical pump | Rotary vane pump | Extraction interface | KF16 |
Pumping | 1.1L/s | |||
Molecular pump | Turbo molecular pump | Extraction interface | CF150 | |
Pumping | 600L/s | Exhaust interface | KF40 | |
Vacuum gauge | Resistance gauge + ionization gauge | |||
Ultimate vacuum degree | 1.3x10-4Pa | Power supply | AC;220V 50/60Hz | |
DC power supply | 1 set | Output power | ≤1000W | |
Output voltage | ≤600W | Response time | ＜5ms | |
RF power supply | 1 set | Output power | ≤1000W | |
Power stability | ≤5W | |||
RF frequency | 13.56MHz | RF stability | ±0.005% | |
Film thickness gauge | Resolution | ±0.03Hz | Accuracy | ±0.5% |
Upper range limit | 50000 | Speed | 100~1000ms | |
Water cooled system | Tank volume | 9L | Flow | 10L/min |
Gas system | Flowmeter type | MFC(mass flow meter) | Range | 200sccm |
Gas type | Ar | |||
Other | Input supply | AC220V,50Hz | Size | 1400x750x1300mm |
Total power | 4kw（host+vacuum pump） | Weight | 295kg | |
New sample table is available
Sample | Size | For Dia.150mm sample max. | Height | 70mm adjustable |
Rotation speed | 1~20rpm | Heating | 0~500℃ |
