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TN-EVP170S-2S-A
TN
Desktop dual-source thermal evaporation coater is equipped with dual sources, allowing for simultaneous deposition of multiple materials. The stainless steel cavity ensures excellent vacuum performance and prevents contamination.
This coater offers precise temperature control, allowing for the deposition of films with high uniformity and reproducibility. It has a user-friendly interface, making it easy to set and monitor the deposition parameters. The desktop design makes it compact and space-saving, ideal for research laboratories and small-scale production.
With its advanced thermal evaporation technology, this coater provides a reliable and efficient solution for thin film deposition. It is suitable for a wide range of applications, including electronics, optoelectronics, solar cells, and surface engineering. The high-quality construction and durable materials ensure long-lasting performance and minimal maintenance requirements.
Invest in this desktop dual-source thermal evaporation coater with stainless steel cavity to enhance your research capabilities and achieve precise thin film deposition. Its professional design and exceptional features make it a valuable asset for any laboratory or production facility.
Product Name | Desktop dual-source thermal evaporation coater |
Product Model | TN-EVP170S-2S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：2500w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Number of evaporation sources: 2, each evaporation source is equipped with baffle; 2、 Evaporation source voltage: 10V 3、 The evaporation current is continuously adjustable from 0 to 100A 4、 With two tungsten boat, two tungsten basket; 5、 Stainless steel rotating upper sample table, diameter of 60mm; 6、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 7、 The vacuum cavity is a stainless steel cavity with an outside diameter of 170mm , an inside diameter 160mm and a height of 210mm; 8、 The air pumping interface of the vacuum chamber is KF40; 9、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning valve is provided by default to adjust the air intake; 10、 Touch screen is 7inch color touch screen; 11、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 12、 safety protection: over current, vacuum is too low automatically cut off the sputtering current; 13、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； 14、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、TN-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); TN-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 5、Film thickness meter crystal oscillator; |
Desktop dual-source thermal evaporation coater is equipped with dual sources, allowing for simultaneous deposition of multiple materials. The stainless steel cavity ensures excellent vacuum performance and prevents contamination.
This coater offers precise temperature control, allowing for the deposition of films with high uniformity and reproducibility. It has a user-friendly interface, making it easy to set and monitor the deposition parameters. The desktop design makes it compact and space-saving, ideal for research laboratories and small-scale production.
With its advanced thermal evaporation technology, this coater provides a reliable and efficient solution for thin film deposition. It is suitable for a wide range of applications, including electronics, optoelectronics, solar cells, and surface engineering. The high-quality construction and durable materials ensure long-lasting performance and minimal maintenance requirements.
Invest in this desktop dual-source thermal evaporation coater with stainless steel cavity to enhance your research capabilities and achieve precise thin film deposition. Its professional design and exceptional features make it a valuable asset for any laboratory or production facility.
Product Name | Desktop dual-source thermal evaporation coater |
Product Model | TN-EVP170S-2S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：2500w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Number of evaporation sources: 2, each evaporation source is equipped with baffle; 2、 Evaporation source voltage: 10V 3、 The evaporation current is continuously adjustable from 0 to 100A 4、 With two tungsten boat, two tungsten basket; 5、 Stainless steel rotating upper sample table, diameter of 60mm; 6、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 7、 The vacuum cavity is a stainless steel cavity with an outside diameter of 170mm , an inside diameter 160mm and a height of 210mm; 8、 The air pumping interface of the vacuum chamber is KF40; 9、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning valve is provided by default to adjust the air intake; 10、 Touch screen is 7inch color touch screen; 11、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 12、 safety protection: over current, vacuum is too low automatically cut off the sputtering current; 13、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； 14、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、TN-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); TN-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 5、Film thickness meter crystal oscillator; |
