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TN-EVP180G-1S-A
TN
This equipment is a small desktop thermal evaporating coater is equipped with a quartz cavity, ensuring high purity and uniformity of the deposited films. It offers precise temperature control, allowing for the deposition of films with different melting points. The coater also features a user-friendly interface, making it easy to operate and monitor the deposition process. With its compact design, the desktop thermal evaporation coater is suitable for research laboratories, universities, and small-scale production facilities. It provides a reliable and efficient solution for the fabrication of high-quality conductive films and thin film materials.
Product Name | Desktop thermal evaporation coater with quartz cavity |
Product Model | TN-EVP180G-1S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：1200w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 evaporation source voltage: 10V 2、 The evaporation current is continuously adjustable from 0 to 100A 3、 With a tungsten boat, a tungsten basket; 4、 Stainless steel rotating upper sample table, diameter of 60mm; 5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 6、 The vacuum cavity is a quartz cavity with a diameter of 180mm and a height of 200mm;； 7、 The air pumping interface of the vacuum chamber is KF25 8、 Air intake interface is 1/4 inch double ferrule joint 9、 Touch screen is 7inch color touch screen 10、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 11、 safety protection: over current, vacuum is too low automatically cut off the sputtering current 12、 Ultimate vacuum：5E-4Pa (matching molecular pump)； 13、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1. For the materials that are sensitive to oxygen, it is recommended to add molecular pump group. 2、In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas. |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF25 clamp bracket; 5、Film thickness meter crystal oscillator; |
This equipment is a small desktop thermal evaporating coater is equipped with a quartz cavity, ensuring high purity and uniformity of the deposited films. It offers precise temperature control, allowing for the deposition of films with different melting points. The coater also features a user-friendly interface, making it easy to operate and monitor the deposition process. With its compact design, the desktop thermal evaporation coater is suitable for research laboratories, universities, and small-scale production facilities. It provides a reliable and efficient solution for the fabrication of high-quality conductive films and thin film materials.
Product Name | Desktop thermal evaporation coater with quartz cavity |
Product Model | TN-EVP180G-1S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：1200w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 evaporation source voltage: 10V 2、 The evaporation current is continuously adjustable from 0 to 100A 3、 With a tungsten boat, a tungsten basket; 4、 Stainless steel rotating upper sample table, diameter of 60mm; 5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 6、 The vacuum cavity is a quartz cavity with a diameter of 180mm and a height of 200mm;； 7、 The air pumping interface of the vacuum chamber is KF25 8、 Air intake interface is 1/4 inch double ferrule joint 9、 Touch screen is 7inch color touch screen 10、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 11、 safety protection: over current, vacuum is too low automatically cut off the sputtering current 12、 Ultimate vacuum：5E-4Pa (matching molecular pump)； 13、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1. For the materials that are sensitive to oxygen, it is recommended to add molecular pump group. 2、In order to achieve a high oxygen free environment, the vacuum chamber should be cleaned at least 3 times with high purity inert gas. |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF25 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF25 clamp bracket; 5、Film thickness meter crystal oscillator; |
