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TN-EVP195S-1S-LT1
TN
This equipment is a small desktop evaporation coater is equipped with a high-quality electric lifting sample platform, ensuring precise and stable sample positioning during the deposition process. The coater utilizes thermal evaporation technique, allowing for efficient and uniform deposition of metal films onto substrates.
With its compact and desktop design, this coater is perfect for laboratories and research facilities with limited space. It is easy to operate, thanks to its user-friendly interface and intuitive controls. The coater also features a high vacuum system, ensuring a clean and controlled environment for film deposition.
The electric lifting sample platform provides adjustable height and rotation, allowing for versatile sample positioning and deposition angles. This ensures optimal film quality and uniformity across the substrate. Additionally, the coater is equipped with a precise temperature control system, enabling accurate control of the deposition temperature.
This desktop thermal evaporation coater is a reliable and efficient solution for various thin film deposition applications. It offers professional-grade performance and precise control, making it an essential tool for researchers and scientists in the fields of materials science, electronics, and optics.
Product Name | Desktop thermal evaporation coater with electric lifting sample platform |
Product Model | TN-EVP195S-1S-LT（T means tall tank ；L means lift） |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：2500w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Number of evaporation sources: 2, each evaporation source is equipped with baffle; 2、 Evaporation source voltage: 10V 3、 The evaporation current is continuously adjustable from 0 to 100A 4、 With 1 tungsten boat,1 tungsten basket; 5、 Stainless steel electric lifting sample platform, diameter is 100mm, rotating speed 1~20rpm continuously adjustable; 6、 The distance between the sample and the evaporation source is continuously adjustable from 190 to 300mm, and can also be adjusted up and down under the vacuum state; 7、 The vacuum cavity is a stainless steel cavity with an outside diameter of 195mm , an inside diameter 185mm and a height of 350mm; 8、 The upper cover is sealed with ISO flange for easy disassembly and inspection; 9、 The cavity is provided with a front door and a quartz observation window with a baffle ;size ofφ60mm 10、 The air pumping interface of the vacuum chamber is KF40; 11、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning valve is provided by default to adjust the air intake; 12、 Touch screen is 7inch color touch screen; 13、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 14、 safety protection: over current, vacuum is too low automatically cut off the sputtering current; 15、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group. |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、 tungsten boat, tungsten basket; 2、 Organic evaporation source (including quartz boat and tungsten wire heating source) 3、 The number of evaporation sources can be selected 1~2 groups; 4、 CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump； 5、 CW3000 circulating water cooler(air cooled ,flow rate 10L per minute) 6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 7、 Film thickness meter crystal oscillator; |
This equipment is a small desktop evaporation coater is equipped with a high-quality electric lifting sample platform, ensuring precise and stable sample positioning during the deposition process. The coater utilizes thermal evaporation technique, allowing for efficient and uniform deposition of metal films onto substrates.
With its compact and desktop design, this coater is perfect for laboratories and research facilities with limited space. It is easy to operate, thanks to its user-friendly interface and intuitive controls. The coater also features a high vacuum system, ensuring a clean and controlled environment for film deposition.
The electric lifting sample platform provides adjustable height and rotation, allowing for versatile sample positioning and deposition angles. This ensures optimal film quality and uniformity across the substrate. Additionally, the coater is equipped with a precise temperature control system, enabling accurate control of the deposition temperature.
This desktop thermal evaporation coater is a reliable and efficient solution for various thin film deposition applications. It offers professional-grade performance and precise control, making it an essential tool for researchers and scientists in the fields of materials science, electronics, and optics.
Product Name | Desktop thermal evaporation coater with electric lifting sample platform |
Product Model | TN-EVP195S-1S-LT（T means tall tank ；L means lift） |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：2500w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 70kg； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Number of evaporation sources: 2, each evaporation source is equipped with baffle; 2、 Evaporation source voltage: 10V 3、 The evaporation current is continuously adjustable from 0 to 100A 4、 With 1 tungsten boat,1 tungsten basket; 5、 Stainless steel electric lifting sample platform, diameter is 100mm, rotating speed 1~20rpm continuously adjustable; 6、 The distance between the sample and the evaporation source is continuously adjustable from 190 to 300mm, and can also be adjusted up and down under the vacuum state; 7、 The vacuum cavity is a stainless steel cavity with an outside diameter of 195mm , an inside diameter 185mm and a height of 350mm; 8、 The upper cover is sealed with ISO flange for easy disassembly and inspection; 9、 The cavity is provided with a front door and a quartz observation window with a baffle ;size ofφ60mm 10、 The air pumping interface of the vacuum chamber is KF40; 11、 Air intake interface is 1/4 inch double ferrule joint ,stainless steel fine-tuning valve is provided by default to adjust the air intake; 12、 Touch screen is 7inch color touch screen; 13、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 14、 safety protection: over current, vacuum is too low automatically cut off the sputtering current; 15、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group. |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、 tungsten boat, tungsten basket; 2、 Organic evaporation source (including quartz boat and tungsten wire heating source) 3、 The number of evaporation sources can be selected 1~2 groups; 4、 CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump； 5、 CW3000 circulating water cooler(air cooled ,flow rate 10L per minute) 6、 KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 7、 Film thickness meter crystal oscillator; |
