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TN-EVP170S-1S-A
TN
This desktop thermal evaporation coater. The stainless steel cavity ensures excellent vacuum performance and high thermal conductivity, allowing for precise and uniform film deposition.
This desktop thermal evaporation coater is equipped with advanced temperature control and deposition rate monitoring systems, ensuring accurate and repeatable film thickness. It also features a user-friendly interface, making it easy to operate and control the coating process.
The compact design of this coater makes it suitable for laboratory and small-scale production environments. It requires minimal space and can be easily integrated into existing setups.
With its versatile capabilities, this desktop thermal evaporation coater is an essential tool for researchers and engineers in the field of thin film technology. It offers reliable and efficient film deposition for a wide range of applications, including semiconductor devices, solar cells, sensors, and more.
Invest in this professional-grade desktop thermal evaporation coater with stainless steel cavity to achieve precise and high-quality thin film coatings. Its robust construction, advanced features, and user-friendly interface make it a valuable asset for any thin film research or production facility.
Product Name | Desktop thermal evaporation coater with stainless steel cavity |
Product Model | TN-EVP170S-1S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：1200w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. · 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg · ； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Evaporation source voltage: 10V 2、 The evaporation current is continuously adjustable from 0 to 100A 3、 With a tungsten boat, a tungsten basket; 4、 Stainless steel sample table, diameter of 60mm; 5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 6、 The vacuum cavity is a stainless steel cavity with an outside diameter of 170mm , an inside diameter 160mm and a height of 210mm; 7、 It is equipped with quartz observation window with baffle, the size is φ60mm 8、 The air pumping interface of the vacuum chamber is KF40; 9、 Air intake interface is 1/4 inch double ferrule joint; 10、 Touch screen is 7inch color touch screen; 11、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 12、 Safety protection: over current, vacuum is too low automatically cut off the sputtering current; 13、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； 14、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group . |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 5、Film thickness meter crystal oscillator; |
This desktop thermal evaporation coater. The stainless steel cavity ensures excellent vacuum performance and high thermal conductivity, allowing for precise and uniform film deposition.
This desktop thermal evaporation coater is equipped with advanced temperature control and deposition rate monitoring systems, ensuring accurate and repeatable film thickness. It also features a user-friendly interface, making it easy to operate and control the coating process.
The compact design of this coater makes it suitable for laboratory and small-scale production environments. It requires minimal space and can be easily integrated into existing setups.
With its versatile capabilities, this desktop thermal evaporation coater is an essential tool for researchers and engineers in the field of thin film technology. It offers reliable and efficient film deposition for a wide range of applications, including semiconductor devices, solar cells, sensors, and more.
Invest in this professional-grade desktop thermal evaporation coater with stainless steel cavity to achieve precise and high-quality thin film coatings. Its robust construction, advanced features, and user-friendly interface make it a valuable asset for any thin film research or production facility.
Product Name | Desktop thermal evaporation coater with stainless steel cavity |
Product Model | TN-EVP170S-1S-A |
Installation Condition | 1、Working environment temperature: 25℃±15℃，humidity: 55%Rh±10%Rh； 2、Equipment power supply：AC220V，50Hz， must be well grounded； 3、Rated power：1200w； 4、Equipment for gas ：The equipment chamber should be filled with argon gas for cleaning. The customer should prepare argon gas with purity ≥99.99%. · 5、Table size requirements: 600mm×600mm×700mm，bearing capacity ≥ 50kg · ； 6、The position should be well ventilated and cooled. |
Technical Indicators | 1、 Evaporation source voltage: 10V 2、 The evaporation current is continuously adjustable from 0 to 100A 3、 With a tungsten boat, a tungsten basket; 4、 Stainless steel sample table, diameter of 60mm; 5、 The distance between the sample platform and the evaporation source is adjustable from 60 to 100mm; 6、 The vacuum cavity is a stainless steel cavity with an outside diameter of 170mm , an inside diameter 160mm and a height of 210mm; 7、 It is equipped with quartz observation window with baffle, the size is φ60mm 8、 The air pumping interface of the vacuum chamber is KF40; 9、 Air intake interface is 1/4 inch double ferrule joint; 10、 Touch screen is 7inch color touch screen; 11、 Adjustable sputtering current ，sputtering safety current value and safety vacuum value can be set； 12、 Safety protection: over current, vacuum is too low automatically cut off the sputtering current; 13、 Ultimate vacuum：1Pa(matching double stage rotary vane pump)； 14、 Vacuum measurement is Parana vacuum gauge ，the range is：1～105Pa |
Notice | 1、In order to give full play to the vacuum performance of the cavity, it is recommended to use it with molecular pump group . |
Optional accessory | |
Film thickness Monitor | 1、Film thickness resolution：0.0136Å（aluminum） 2、Accuracy of film thickness ：±0.5%，it depends on process conditions, especially sensor position, material stress, temperature and density 3、Measuring speed：100ms to 1s per times ，measurement range can be set ：500000Å（aluminum） 4、Standard sensor crystal：6MHz 5、Suitable for wafer frequency：6MHz suitable for wafer size：Φ14mm mounting flange：CF35 |
Another Accessory | 1、tungsten boat, tungsten basket; 2、Organic evaporation source (including quartz boat and tungsten wire heating source) 3、CY-CZK103 series high performance molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~105Pa); CY-GZK60 series small molecular pump set(including composite vacuum gauge, measuring range 10-5Pa~102Pa) VRD-4 bipolar rotary vane vacuum pump 4、KF40 Vacuum bellows; The length can be 0.5m, 1m or 1.5m. KF40 clamp bracket; 5、Film thickness meter crystal oscillator; |
