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3 rotary target Plasma Sputtering Coater Machine with water chiller for Thin Film Coating

This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process
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  • TN-PSP180G-3TA-RS

  • TN

ering technology, it ensures a uniform and high-quality thin film coating. The machine is equipped with a water chiller to maintain stable temperature during the coating process, ensuring consistent and accurate results.


With its compact design, this rotary target plasma sputtering coater machine is perfect for laboratories or research institutions with limited space. It is easy to operate, thanks to its user-friendly interface and intuitive controls. The two-stage sputtering method allows for precise control of the coating thickness, making it suitable for various applications.


The machine is capable of coating a wide range of materials, including metals, ceramics, and polymers. It can be used for SEM sample preparation, metal coating experiments, or any other thin film coating applications. The low-temperature plasma sputtering technology ensures minimal damage to the substrate and excellent adhesion of the coating.


With its high efficiency and reliability, this plasma sputtering coater machine is an essential tool for any laboratory or research facility. It offers precise and consistent results, helping researchers and scientists achieve their desired thin film coatings with ease. Invest in this professional-grade coater machine and enhance your research capabilities today.

Technical parameters:

Product model

TN-PSP180G-3TA-RS

Sample   stage

Size

100mm  

Distance   from sample stage to target surface

20~35mm   height adjustable

Rotating   speed

1~20rpm   adjustable

Heating   temperature

≤500℃

Temperature   control accuracy

±1℃ PID   temperature control

Plasma   sputtering source

Quantity

2   inchesx1/2/3

Cooling   method

Water   cooling/Natural cooling

Vacuum   chamber

Chamber   size

φ180mm x   210mm    

Observation   window

Omnidirectional   visibility

Chamber   material

High   purity quartz

Open   method

Top   cover removable

Upper   and lower cover material

304   stainless steel

Pumping   port

KF16

Intake   port

1/4   inch ferrule connector

Power   configuration

Quantity

DC   power supplyx1

Output   power

Max.   150W

Sputtering   power

1200V

Max.   sputtering current

50mA

Vacuum   system

Vacuum   pump type

Dual-stage   rotary vane vacuum pump

Pumping   port

KF16

Exhaust   interface

KF16

Pumping   rate

1.1L/s(4m3/h)

Ultimate   vacuum

≥0.1Pa

Vacuum   measurement

Resistance   vacuum gauge

Others

Power   supply

AC   220V  50Hz

Total   power

1.5kW/2kW

Dimension

500mm   x 320mm x470mm

Weight

30kg



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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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