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Small plasma sputtering coater with rotary heating stage & water chiller for coating Au,Ag and cu

This type of small plasma sputtering coating machine adopts two-stage sputtering method, which is widely used for SEM sample preparation or metal coating experiment. Using low-temperature plasma sputtering process, there is no high temperature during the coating process
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  • TN-PSP180G-2TA-RS

  • TN

ering technology, it provides precise and uniform coating of Au, Ag, and Cu on various substrates. The rotary heating stage ensures even heating and allows for the deposition of thin films with excellent adhesion. The water chiller maintains a stable temperature during the coating process, ensuring optimal performance and preventing overheating.


With its compact design and user-friendly interface, this small plasma sputtering coater is perfect for research laboratories, universities, and industrial applications. It offers a wide range of coating options, allowing users to achieve desired thickness and composition for their specific requirements. The two-stage sputtering method enhances the coating efficiency and reduces the deposition time, making it a highly efficient and time-saving solution.


Equipped with advanced safety features, including overheat protection and automatic shutdown, this coater ensures a safe working environment. The professional-grade construction and high-quality materials guarantee long-lasting performance and durability.


Whether you need to prepare SEM samples or conduct metal coating experiments, this small plasma sputtering coater with a rotary heating stage and water chiller is the ideal choice. Its precise coating capabilities, efficient operation, and user-friendly design make it an essential tool for any laboratory or research facility. Invest in this reliable and versatile coater to enhance your scientific research and achieve superior coating results.

Technical parameters:

Product model

TN-PSP180G-2TA-RS

Sample   stage

Size

100mm  

Distance   from sample stage to target surface

20~35mm   height adjustable

Rotating   speed

1~20rpm   adjustable

Heating   temperature

≤500℃

Temperature   control accuracy

±1℃ PID   temperature control

Plasma   sputtering source

Quantity

2   inchesx1/2/3

Cooling   method

Water   cooling/Natural cooling

Vacuum   chamber

Chamber   size

φ180mm x   210mm    

Observation   window

Omnidirectional   visibility

Chamber   material

High   purity quartz

Open   method

Top   cover removable

Upper   and lower cover material

304   stainless steel

Pumping   port

KF16

Intake   port

1/4   inch ferrule connector

Power   configuration

Quantity

DC   power supplyx1

Output   power

Max.   150W

Sputtering   power

1200V

Max.   sputtering current

50mA

Vacuum   system

Vacuum   pump type

Dual-stage   rotary vane vacuum pump

Pumping   port

KF16

Exhaust   interface

KF16

Pumping   rate

1.1L/s(4m3/h)

Ultimate   vacuum

≥0.1Pa

Vacuum   measurement

Resistance   vacuum gauge

Others

Power   supply

AC   220V  50Hz

Total   power

1.5kW/2kW

Dimension

500mm   x 320mm x470mm

Weight

30kg



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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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