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TNO1200-60IIC-R
TN
The Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is a cutting-edge solution designed to enhance the efficiency and accuracy of PECVD processes.
This innovative product offers a seamless and precise feeding and receiving mechanism for powder materials used in PECVD cleaning. With its rotary tube furnace design, it ensures uniform heating and distribution of the powder, resulting in consistent and high-quality thin film deposition.
The Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is equipped with advanced plasma technology, which enables the deposition of thin films with exceptional adhesion and uniformity. This ensures that the resulting films meet the stringent requirements of the electronics industry, guaranteeing optimal performance and reliability.
Designed with the utmost professionalism, this product is manufactured using high-quality materials and components, ensuring durability and long-lasting performance. Its user-friendly interface and intuitive controls make it easy to operate and maintain, reducing downtime and maximizing productivity.
With its compact and space-saving design, the Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning can be seamlessly integrated into existing PECVD systems, minimizing installation and setup time. Its robust construction and precise engineering ensure stable and reliable operation, even in demanding industrial environments.
In summary, the Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is a state-of-the-art solution that revolutionizes the PECVD cleaning process. Its advanced features, professional design, and exceptional performance make it an indispensable tool for the electronics industry, ensuring superior thin film deposition and optimal product quality.
Technical Parameters
Dual temperature zone tube furnace | Product model | TNO1200-60IIC-R |
Equipment power | 3KW | |
Furnace tube material | High purity quartz | |
Furnace tube size | Φ60*420+Φ100*360+Φ60*420mm (Quartz heteromorphic tube) | |
Furnace chamber length | 440mm | |
Heating zone length | 200mm+200mm | |
Operating temperature | 0～1150℃ | |
Limit temperature | 1200℃ | |
Temperature control accuracy | ±1℃ | |
Thermocouple type | K-type thermocouple | |
Temperature control mode | 30-segment program temperature control, PID parameter self-tuning | |
Display mode | HD full color LCD touch screen | |
Sealing method | 304 stainless steel vacuum flange | |
Power supply | AC: 220V 50/60Hz | |
Rotation speed | 0~13rpm | |
Tilt angle | 0~35° | |
3-channel mass flow meter | Product model | CY-3Z |
Number of gas paths | 3 channels | |
Flowmeter type | Mass flowmeter | |
Measuring range | A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm | |
Measurement accuracy | ±1.5% | |
Working pressure difference | 0.1~0.5MPa | |
Pipeline interface | 1/4 inch ferrule connector | |
Power supply | AC220V 50/60Hz | |
Vacuum system | Vacuum pump | Dual stage rotary vane pump |
Pumping speed | 1.1L/s | |
Pumping port | KF16 | |
Pump ultimate vacuum | 10E-1Pa | |
Power supply | AC220V 50/60Hz | |
RF power supply | Signal frequency | 13.56MHz±0.005% |
Power output range | 0~500W | |
Maximum reflected power | 100W | |
RF output interface | 50Ω, N-Type, female | |
Power stability | ≤5W |
The Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is a cutting-edge solution designed to enhance the efficiency and accuracy of PECVD processes.
This innovative product offers a seamless and precise feeding and receiving mechanism for powder materials used in PECVD cleaning. With its rotary tube furnace design, it ensures uniform heating and distribution of the powder, resulting in consistent and high-quality thin film deposition.
The Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is equipped with advanced plasma technology, which enables the deposition of thin films with exceptional adhesion and uniformity. This ensures that the resulting films meet the stringent requirements of the electronics industry, guaranteeing optimal performance and reliability.
Designed with the utmost professionalism, this product is manufactured using high-quality materials and components, ensuring durability and long-lasting performance. Its user-friendly interface and intuitive controls make it easy to operate and maintain, reducing downtime and maximizing productivity.
With its compact and space-saving design, the Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning can be seamlessly integrated into existing PECVD systems, minimizing installation and setup time. Its robust construction and precise engineering ensure stable and reliable operation, even in demanding industrial environments.
In summary, the Rotary Tube Furnace Feeding Receiving for Powder PE CVD Cleaning is a state-of-the-art solution that revolutionizes the PECVD cleaning process. Its advanced features, professional design, and exceptional performance make it an indispensable tool for the electronics industry, ensuring superior thin film deposition and optimal product quality.
Technical Parameters
Dual temperature zone tube furnace | Product model | TNO1200-60IIC-R |
Equipment power | 3KW | |
Furnace tube material | High purity quartz | |
Furnace tube size | Φ60*420+Φ100*360+Φ60*420mm (Quartz heteromorphic tube) | |
Furnace chamber length | 440mm | |
Heating zone length | 200mm+200mm | |
Operating temperature | 0～1150℃ | |
Limit temperature | 1200℃ | |
Temperature control accuracy | ±1℃ | |
Thermocouple type | K-type thermocouple | |
Temperature control mode | 30-segment program temperature control, PID parameter self-tuning | |
Display mode | HD full color LCD touch screen | |
Sealing method | 304 stainless steel vacuum flange | |
Power supply | AC: 220V 50/60Hz | |
Rotation speed | 0~13rpm | |
Tilt angle | 0~35° | |
3-channel mass flow meter | Product model | CY-3Z |
Number of gas paths | 3 channels | |
Flowmeter type | Mass flowmeter | |
Measuring range | A channel: 0~100sccm; B channel: 0~200 sccm; C channel: 0~500 sccm | |
Measurement accuracy | ±1.5% | |
Working pressure difference | 0.1~0.5MPa | |
Pipeline interface | 1/4 inch ferrule connector | |
Power supply | AC220V 50/60Hz | |
Vacuum system | Vacuum pump | Dual stage rotary vane pump |
Pumping speed | 1.1L/s | |
Pumping port | KF16 | |
Pump ultimate vacuum | 10E-1Pa | |
Power supply | AC220V 50/60Hz | |
RF power supply | Signal frequency | 13.56MHz±0.005% |
Power output range | 0~500W | |
Maximum reflected power | 100W | |
RF output interface | 50Ω, N-Type, female | |
Power stability | ≤5W |
