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Roll To Roll PECVD Graphene Preparation Equipment for Continuous Production of Flexible Transparent Electrodes

Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation,It can be used in screens of computer and cellphone, ultra-light flexible solar cells, new luminescent devices and other film electronics fields
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  • TN-OTF-1200X-III-PE300-RR

  • TN

Roll to roll PEVCD is a roll-to-roll tubular furnace system for graphene preparation. The equipment consists of coil to coil copper foil rewinding and placing sealing device, 1200°C tube furnace with three temperature zones and vacuum unit. It can be used for large-scale growth of high quality graphene and other two-dimensional materials.


Roll to roll PEVCD technical parameters:

Performance specifications and basic configurations

Product   name

Roll   to roll PEVCD

Product   model

TN-OTF-1200X-III-PE300-RR

1000W Plasma source

● Output power:50-1000W  Maximum adjustable ±1%
  ● RF rate: 13.56MHz,stability±0.005%
  ● dB:≤55DB
  ● Cooling mode :forced air cooling
  ● Input power:1KW  AC 220V

Three proton flow meter control system

● Voltage:AC220V/50Hz
  ● Power:23W
  ● PLC touch screen control
  ● Size of mixing tank:φ80*120mm
  ●Operating temperature:5~45℃
  ● Maximum pressure: 3x106 Pa
  ● Precision : ±1.5% FS
  ● Linear: ±(0.5-1.5)%F.S.
  ● Repeated accuracy: ±0.2%F.S.
  ● Range of flow:
  ● The first path : 1~50 SCCM (Methane calibration)
  ● The second path: 1~200 SCCM (Hydrogen   calibration)
  ● The third path: 1~200 SCCM (Argon calibration)
  Other options are available for gas type calibration according to customer   requirements

Vacuum measure unit

●Model:PCG-800
  ● Indication range:3.8E-5 to 1125torr
  Precision:
  ● 5×10-4 … 1×10-3 mbar (N2) % of reading ±50
  ● 1×10-3 … 100 mbar (N2) % of reading ±15
  ● 100 … 950 mbar % of reading ±5
  ● 950 … 1050 mbar % of reading ±2.5

Low vacuum unit

● It is composed of double-rotating mechanical pump,   double-layer vertical oil mist filter (PE material), resistance vacuum gauge   and connecting pipe joint

● Suction rate of vacuum pump≥4.4L/s
  ● Limit vacuum degree 10-1Pa
  ●Vacuum gauge measuring range 10-1Pa-105 Pa

Reel-to-reel sealing devices for copper foil

·           ● Coil to coil winding and unwinding mechanism   is used to move copper foil in and out of the material, and the moving speed   of copper foil is adjustable from 1-400mm/min.
  ● Configure a roll of test copper foil

● The winding and unwinding mechanism is placed in the   vacuum chamber at both ends of the tube furnace to ensure that the copper   foil can move under sealed growth conditions and achieve large-scale   preparation
  ● A cooling device is set between the winding mechanism   and the tubular furnace for rapid cooling of copper foil.

Product size

About 2400*800*1250mm

Product weight

About 720kg

Quality certificate

CE certification is optional for electrical components

Warranty period

Special note:  

1. Consumables such as heating element, quartz tube, sample crucible,   etc. are not included.  

2. Damage caused by corrosive and acidic gases is not covered by the   warranty.


The Roll To Roll PECVD Graphene Preparation Equipment is designed for efficient and high-quality production of graphene films. To begin using this equipment, ensure that the setup is installed in a clean, controlled environment to prevent contamination. Start by preparing the substrate material, which should be compatible with the PECVD process. Common substrates include copper and silicon, which provide a stable base for graphene growth.


Next, load the substrate onto the roll-to-roll system, ensuring it is securely positioned. Adjust the tension settings to maintain a consistent feed rate during the deposition process. Once the substrate is in place, select the appropriate gas mixtures for the graphene synthesis, typically including carbon-containing gases like methane. Set the pressure and temperature parameters according to the desired film properties, as these factors significantly influence the quality and thickness of the graphene layer.


Begin the PECVD process by initiating the plasma generation. Monitor the system closely, checking for stable plasma and uniform deposition across the substrate. The roll-to-roll design allows for continuous processing, enhancing productivity while maintaining quality. Once the deposition is complete, carefully unwind the substrate and evaluate the graphene film for uniformity and adherence.


Finally, perform necessary post-treatment processes, such as annealing, to optimize the electrical and mechanical properties of the graphene. Regular maintenance of the equipment is crucial for ensuring longevity and consistent performance. By following these steps, users can effectively utilize the Roll To Roll PECVD Graphene Preparation Equipment to produce high-quality graphene films for various applications.


Roll-to-Roll PECVD Graphene Preparation Equipment is an advanced technology used in various fields, particularly in the electronics and renewable energy sectors. This equipment is primarily utilized for the continuous growth of high-quality graphene films on flexible substrates like copper foil. The applications of graphene prepared using this equipment are diverse and impactful.


One of the prominent applications of graphene prepared through Roll-to-Roll PECVD technology is in the production of computer and cellphone screens. Graphene’s excellent electrical conductivity, transparency, and mechanical strength make it an ideal material for touch screens and display panels. It enhances the sensitivity and durability of these screens, providing a better user experience.


Moreover, this equipment is crucial in the development of ultra-light flexible solar cells. Graphene’s unique properties, such as its high electron mobility and thermal conductivity, enable the creation of efficient and lightweight solar panels. These solar cells are not only more flexible but also have the potential to be more cost-effective, making renewable energy more accessible.


In addition to solar cells, graphene has applications in new luminescent devices. The integration of graphene into light-emitting diodes (LEDs) and organic light-emitting diodes (OLEDs) can significantly improve their performance. Graphene-based luminescent devices are expected to be more energy-efficient and have longer lifespans, contributing to advancements in display technology and general lighting solutions.


The Roll-to-Roll PECVD Graphene Preparation Equipment also finds its use in various film electronics fields. Graphene’s thin, flexible nature makes it suitable for a wide range of electronic applications, including flexible circuits, sensors, and wearable technology. These applications benefit from graphene’s exceptional electrical properties and its ability to be integrated into existing electronic systems seamlessly.


In summary, the Roll-to-Roll PECVD Graphene Preparation Equipment is a versatile tool that enables the production of high-quality graphene for use in computer and cellphone screens, ultra-light flexible solar cells, new luminescent devices, and various other film electronics applications. Its impact on these fields is significant, driving innovation and improving the performance of electronic devices and renewable energy solutions.


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