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1200℃ Three Heating Zone Low Vacuum CVD System with 3-channel Float Flowmeter To Supply Gas

chemical vapor deposition machine is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres
 
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  • TN-1200X-III-50IC

  • TN

This equipment consists of a three-heating zone tube furnace and a three-channel float flow meter. The three heating zones of the tube furnace are independently temperature controlled by the precision temperature control instrument. By adjusting the temperature of each temperature zone, the tube furnace can form three temperature gradients in the heating zone or form a long constant temperature zone. Each zone can be edited with 30 sections of temperature rise and fall, with overheating and short circuit protection. The flanges on both sides of the furnace tube are equipped with a digital vacuum gauge and a mechanical pressure gauge, which can be used to control the atmosphere in the furnace tube. At the same time, the tube furnace is operated by full-color high-definition touch screen, which is easy to use. Even non-professionals can master the use of the instrument after simple training, which can greatly improve your experiment efficiency.

The system is equipped with a three-channel float flowmeter, which can accurately prepare the mixed gas required for the experiment. Another pressure gauge is installed on the front of the float flowmeter to monitor the gas pressure and the mixing tank pressure.

It is suitable for high-temperature sintering, metal annealing, quality inspection, etc. in universities, research institutes, industrial and mining enterprises, especially for CVD experiments that require a variety of gas mixing atmospheres.

Vacuum tube   furnace

Model

TN-1200X-III-50IC

Tube material

High purity   quartz

Tube diameter

50mm

Tube length

1000mm

Furnace chamber   length

660mm

Heating zone   length

200mm+200mm+200mm

Operating   temperature

0~1100℃

Temperature   control accuracy

±1℃

Temperature   control mode

30 or 50   segment program temperature control

Display mode

LED   (highlight digital tube display)

Sealing   method

304   stainless steel vacuum flange

Flange   interface

1/4" cutting   sleeve joint (Ø8 pagoda joint)

Vacuum

4.4×10E-3Pa

Power supply

AC:220V   50/60Hz

Gas supply   system

Model

CY-3F

Gas channel

3-channel

Measuring   unit

Gas float   flowmeter

Measuring   range

A channel: 0~100ml H2 gas

Remarks: If   you need other ranges or gas types, you need to specify when ordering.   According to the customer's specific requirements, the flow meter of the   corresponding gas type and range can be selected.

B channel: 16~160ml N2 gas

C channel: 25~250ml Ar gas

measurement   accuracy

±2.0%

Pipe   pressure resistance

3MPa

Working   pressure difference

50~500KPa

Connecting   pipe

304   stainless steel

Gas channel

304 stainless   steel needle valve

Interface   specification

1/4" cutting   sleeve joint for gas inlet and outlet

Exhaust   system

Mechanical   pump

GHD-031B

Pumping rate

4L/S

Exhaust   interface

KF16

Vacuum   measurement

Pirani gauge

Ultimate   vacuum

1×10E-1Pa

Power supply

AC:220V   50/60Hz

Pumping   interface

KF40


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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