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Introducing our cutting-edge CVD (Chemical Vapor Deposition) systems, designed to revolutionize your substrate material processing. With utmost precision and reliability, our CVD systems are engineered to cater to a wide range of materials, including silicon, glass, metals, and more.
Crafted with industry-leading expertise, our CVD systems ensure exceptional performance and consistent results, making them an ideal choice for diverse applications. Whether you're working with delicate glass substrates or robust metal surfaces, our CVD systems deliver unparalleled quality and efficiency.
Equipped with advanced technology, our CVD systems offer a seamless and controlled deposition process. With precise control over temperature, pressure, and gas flow, you can achieve the desired film characteristics with utmost accuracy. This level of control guarantees uniform and defect-free coatings, enhancing the overall performance and durability of your products.
Our CVD systems are designed with user-friendliness in mind, featuring intuitive interfaces and streamlined operations. With minimal training required, you can effortlessly operate the system, saving valuable time and resources.
Additionally, our CVD systems are built to meet the highest safety standards, ensuring a secure working environment. With robust safety features and comprehensive monitoring systems, you can have peace of mind while utilizing our equipment.
Invest in our state-of-the-art CVD systems and unlock limitless possibilities for your substrate material processing needs. Experience unrivaled performance, unmatched reliability, and exceptional quality with our professional-grade CVD systems. Elevate your production capabilities and stay ahead in today's competitive market.
RF power supply | Signal frequency | 13.56MHz±0.005% | |
Power output range | 0~300W | ||
Maximum reflected power | 100W | ||
Reflected power (at maximum power) | <3W | ||
Power stability | ±0.1% | ||
Tube furnace | Tube material | High purity quartz | |
Outer diameter of tube | 100mm | ||
Tube length | 1200mm | ||
Furnace chamber length | 440mm | ||
Heating zone length | 200mm+200mm (two temperature zone) | ||
Constant temperature zone length | 200mm | ||
Continuous working temperature | |||
Temperature control accuracy | ±1℃ | ||
Temperature control mode | 30 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Gas supply system | Model | CY-6Z | |
Channel numbers | 6 | ||
Measuring unit | Mass flow controller | ||
Measuring range | A channel: 0~200SCCM for H2 | Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. | |
B channel: 0~200SCCM for CH4 | |||
C channel: 0~200SCCM for C2H4 | |||
C channel: 0~500SCCM for N2 | |||
D channel: 0~500SCCM for NH3 | |||
E channel: 0~500SCCM for Ar | |||
Measurement accuracy | ±1.5%F.S | ||
Working pressure difference | -0.15Mpa~0.15Mpa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Vacuum system | Mechanical pump | Double-stage rotary vane pump | |
Pumping rate | 1.1L/S | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Pumping interface | KF16 | ||
Sliding rail | Can achieve the sliding of two temperature zone furnace, to realize rapid temperature rise and fall. | ||
Power supply | AC220V 50Hz |
Introducing our cutting-edge CVD (Chemical Vapor Deposition) systems, designed to revolutionize your substrate material processing. With utmost precision and reliability, our CVD systems are engineered to cater to a wide range of materials, including silicon, glass, metals, and more.
Crafted with industry-leading expertise, our CVD systems ensure exceptional performance and consistent results, making them an ideal choice for diverse applications. Whether you're working with delicate glass substrates or robust metal surfaces, our CVD systems deliver unparalleled quality and efficiency.
Equipped with advanced technology, our CVD systems offer a seamless and controlled deposition process. With precise control over temperature, pressure, and gas flow, you can achieve the desired film characteristics with utmost accuracy. This level of control guarantees uniform and defect-free coatings, enhancing the overall performance and durability of your products.
Our CVD systems are designed with user-friendliness in mind, featuring intuitive interfaces and streamlined operations. With minimal training required, you can effortlessly operate the system, saving valuable time and resources.
Additionally, our CVD systems are built to meet the highest safety standards, ensuring a secure working environment. With robust safety features and comprehensive monitoring systems, you can have peace of mind while utilizing our equipment.
Invest in our state-of-the-art CVD systems and unlock limitless possibilities for your substrate material processing needs. Experience unrivaled performance, unmatched reliability, and exceptional quality with our professional-grade CVD systems. Elevate your production capabilities and stay ahead in today's competitive market.
RF power supply | Signal frequency | 13.56MHz±0.005% | |
Power output range | 0~300W | ||
Maximum reflected power | 100W | ||
Reflected power (at maximum power) | <3W | ||
Power stability | ±0.1% | ||
Tube furnace | Tube material | High purity quartz | |
Outer diameter of tube | 100mm | ||
Tube length | 1200mm | ||
Furnace chamber length | 440mm | ||
Heating zone length | 200mm+200mm (two temperature zone) | ||
Constant temperature zone length | 200mm | ||
Continuous working temperature | |||
Temperature control accuracy | ±1℃ | ||
Temperature control mode | 30 segment program temperature control | ||
Display mode | LCD | ||
Sealing method | 304 stainless steel vacuum flange | ||
Gas supply system | Model | CY-6Z | |
Channel numbers | 6 | ||
Measuring unit | Mass flow controller | ||
Measuring range | A channel: 0~200SCCM for H2 | Remarks: If other ranges are required, please specify when ordering. According to the customer's specific requirements, the flow meter of corresponding gas type and range is optional. | |
B channel: 0~200SCCM for CH4 | |||
C channel: 0~200SCCM for C2H4 | |||
C channel: 0~500SCCM for N2 | |||
D channel: 0~500SCCM for NH3 | |||
E channel: 0~500SCCM for Ar | |||
Measurement accuracy | ±1.5%F.S | ||
Working pressure difference | -0.15Mpa~0.15Mpa | ||
Connecting pipe | 304 stainless steel | ||
Gas channel | 304 stainless steel needle valve | ||
Interface specification | 1/4" ferrule connector for gas inlet and outlet | ||
Vacuum system | Mechanical pump | Double-stage rotary vane pump | |
Pumping rate | 1.1L/S | ||
Vacuum measurement | Resistance gauge | ||
Ultimate vacuum | 1.0E-1Pa | ||
Pumping interface | KF16 | ||
Sliding rail | Can achieve the sliding of two temperature zone furnace, to realize rapid temperature rise and fall. | ||
Power supply | AC220V 50Hz |