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PECVD System (ICP PECVD) for Deposition of Thick SiOx Ge-SiOx Films

PECVD (Chemical Vapor Deposition) is a commonly used thin film deposition technique, which involves the reaction of gas-phase reactants with a substrate surface at high temperatures to form a thin film
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Introducing our cutting-edge CVD (Chemical Vapor Deposition) systems, designed to revolutionize your substrate material processing. With utmost precision and reliability, our CVD systems are engineered to cater to a wide range of materials, including silicon, glass, metals, and more.


Crafted with industry-leading expertise, our CVD systems ensure exceptional performance and consistent results, making them an ideal choice for diverse applications. Whether you're working with delicate glass substrates or robust metal surfaces, our CVD systems deliver unparalleled quality and efficiency.


Equipped with advanced technology, our CVD systems offer a seamless and controlled deposition process. With precise control over temperature, pressure, and gas flow, you can achieve the desired film characteristics with utmost accuracy. This level of control guarantees uniform and defect-free coatings, enhancing the overall performance and durability of your products.


Our CVD systems are designed with user-friendliness in mind, featuring intuitive interfaces and streamlined operations. With minimal training required, you can effortlessly operate the system, saving valuable time and resources.


Additionally, our CVD systems are built to meet the highest safety standards, ensuring a secure working environment. With robust safety features and comprehensive monitoring systems, you can have peace of mind while utilizing our equipment.


Invest in our state-of-the-art CVD systems and unlock limitless possibilities for your substrate material processing needs. Experience unrivaled performance, unmatched reliability, and exceptional quality with our professional-grade CVD systems. Elevate your production capabilities and stay ahead in today's competitive market.

RF   power supply

Signal   frequency

13.56MHz±0.005%

Power   output range

0~300W

Maximum   reflected power

100W

Reflected   power (at maximum power)

<3W

Power   stability

±0.1%

Tube furnace

Tube   material

High   purity quartz

Outer   diameter of tube

100mm

Tube   length

1200mm

Furnace   chamber length

440mm

Heating   zone length

200mm+200mm   (two temperature zone)

Constant   temperature zone length

200mm

Continuous   working temperature

Max.1100℃

Temperature   control accuracy

±1℃

Temperature   control mode

30   segment program temperature control

Display   mode

LCD

Sealing   method

304   stainless steel vacuum flange

Gas   supply

system

Model

CY-6Z

Channel   numbers

6

Measuring   unit

Mass   flow controller

Measuring   range

A   channel: 0~200SCCM   for H2  

Remarks:   If other ranges are required, please specify when ordering. According to the   customer's specific requirements, the flow meter of corresponding gas type   and range is optional.

B   channel: 0~200SCCM   for CH4

C   channel: 0~200SCCM   for C2H4

C   channel: 0~500SCCM   for N2

D   channel: 0~500SCCM   for NH3

E   channel: 0~500SCCM   for Ar

Measurement accuracy

±1.5%F.S

Working   pressure difference

-0.15Mpa~0.15Mpa

Connecting   pipe

304   stainless steel

Gas   channel

304   stainless steel needle valve

Interface   specification

1/4"   ferrule connector for gas inlet and outlet

Vacuum   system

Mechanical   pump

Double-stage   rotary vane pump

Pumping   rate

1.1L/S  

Vacuum   measurement

Resistance   gauge

Ultimate   vacuum

1.0E-1Pa

Pumping   interface

KF16

Sliding   rail

Can   achieve the sliding of two temperature zone furnace, to realize rapid temperature   rise and fall.

Power   supply

AC220V   50Hz


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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