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Magnetic Deflection Electron Bombardment Evaporation Source for Thermal Evaporation Coater
Product Parameter:
Heating mode | Electron bombardment radiation |
Filament | W wire、Ta wire |
Electron acceleration voltage | 1000-3000V |
Electron beam deflection angle | 270° |
Evaporating temperature | >2300℃ |
Crucible | Graphite、Mo、Ta |
Crucible volume | 2cc |
Crucible number | 1-3 |
Water cooling shroud | Have |
Baffle | Alternative |
Power supply | 5kW |
Flange | ICF152 |
Baking temperature | 200℃ |
Magnetic Deflection Electron Bombardment Evaporation Source for Thermal Evaporation Coater
Product Parameter:
Heating mode | Electron bombardment radiation |
Filament | W wire、Ta wire |
Electron acceleration voltage | 1000-3000V |
Electron beam deflection angle | 270° |
Evaporating temperature | >2300℃ |
Crucible | Graphite、Mo、Ta |
Crucible volume | 2cc |
Crucible number | 1-3 |
Water cooling shroud | Have |
Baffle | Alternative |
Power supply | 5kW |
Flange | ICF152 |
Baking temperature | 200℃ |