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Magnetic Deflection Electron Bombardment Evaporation Source for Thermal Evaporation Coater

Magnetic Deflection Electron Bombardment Evaporation Source for Thermal Evaporation Coater
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  • TN

Magnetic Deflection Electron Bombardment Evaporation Source for Thermal Evaporation Coater

Product Parameter:

Heating mode

Electron bombardment radiation

Filament

W wire、Ta   wire

Electron acceleration voltage

1000-3000V

Electron beam deflection angle

270°

Evaporating temperature

>2300℃

Crucible

Graphite、Mo、Ta

Crucible volume

2cc

Crucible number

1-3

Water cooling shroud

Have

Baffle

Alternative

Power supply

5kW

Flange

ICF152

Baking temperature

200℃


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