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TN-EVP325S-4S-T
TN
This equipment is a four-source high-vacuum evaporation coater. The equipment adopts a front-opening door vacuum chamber design. In addition, the chamber is increased to 500mm. The distance between the sample stage and the evaporation source has a larger adjustment range, which can adapt to various evaporation needs. It avoids the sample being damaged by the high temperature of the evaporation source.
The chamber adopts an top sample stage, the sample stage can be rotated, heated and lifted, and all operations can be integrated and controlled through the touch screen. The equipment vacuum system is a two-stage vacuum system composed of a two-stage rotary vane pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment. The equipment is equipped with a pneumatic valve system. Through the automatic control of the operating system, the user can perform operations such as one-button vacuum pumping, non-stop take out and place sample, and complete shutdown from the touch screen.
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800℃. It can realize multi-layer coating or mixed coating of multiple materials.
Technical parameters:
Four source high vacuum evaporation coating equipment | ||||
Sample stage | Size | Maximum support φ150mm samples | Height | Adjustable up and down 140mm |
Evaporation source | Quantity | Tungsten Boat x4 | ||
Vacuum chamber | Chamber size | φ325mm x 510mm | Observation window | Front φ100mm with shading plate |
Chamber material | 304 stainless steel | Open method | Front door opening | |
Film thickness control | Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller | |||
Vacuum system | Backing pump | Two stage rotary vane pump | Pumping port | KF16 |
Secondary pump | Turbomolecular pump | Pumping port | CF160 | |
Vacuum measurement | Resistance + ionization Compound vacuum gauge | Exhaust rate | Mechanical pump 1.1L/s | |
Ultimate vacuum | 1.0E-5Pa | Power supply | Molecular pump 600L/s | |
Control system | PLC automatic control Operation interface: touch screen + operation panel | |||
Others | Supply voltage | AC220V,50Hz | Overall size | 1000mm x 800mm x 1500mm |
Total power | 10kW | Total Weight | 350kg | |
This equipment is a four-source high-vacuum evaporation coater. The equipment adopts a front-opening door vacuum chamber design. In addition, the chamber is increased to 500mm. The distance between the sample stage and the evaporation source has a larger adjustment range, which can adapt to various evaporation needs. It avoids the sample being damaged by the high temperature of the evaporation source.
The chamber adopts an top sample stage, the sample stage can be rotated, heated and lifted, and all operations can be integrated and controlled through the touch screen. The equipment vacuum system is a two-stage vacuum system composed of a two-stage rotary vane pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment. The equipment is equipped with a pneumatic valve system. Through the automatic control of the operating system, the user can perform operations such as one-button vacuum pumping, non-stop take out and place sample, and complete shutdown from the touch screen.
The equipment is equipped with four sets of tungsten boat evaporation sources and water-cooled copper electrode. Each evaporation source supports a large current of 100A and a heating temperature of 1800℃. It can realize multi-layer coating or mixed coating of multiple materials.
Technical parameters:
Four source high vacuum evaporation coating equipment | ||||
Sample stage | Size | Maximum support φ150mm samples | Height | Adjustable up and down 140mm |
Evaporation source | Quantity | Tungsten Boat x4 | ||
Vacuum chamber | Chamber size | φ325mm x 510mm | Observation window | Front φ100mm with shading plate |
Chamber material | 304 stainless steel | Open method | Front door opening | |
Film thickness control | Crystal oscillator type film thickness measuring instrument, optional multi-channel film thickness controller | |||
Vacuum system | Backing pump | Two stage rotary vane pump | Pumping port | KF16 |
Secondary pump | Turbomolecular pump | Pumping port | CF160 | |
Vacuum measurement | Resistance + ionization Compound vacuum gauge | Exhaust rate | Mechanical pump 1.1L/s | |
Ultimate vacuum | 1.0E-5Pa | Power supply | Molecular pump 600L/s | |
Control system | PLC automatic control Operation interface: touch screen + operation panel | |||
Others | Supply voltage | AC220V,50Hz | Overall size | 1000mm x 800mm x 1500mm |
Total power | 10kW | Total Weight | 350kg | |
