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High Vacuum Three Source Evaporation Coater With Three Evaporation Source for Nano And Microelectronics

High Vacuum Three Source Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensor,Optical element ,Nano and Microelectronics,Solar battery
 
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  • TN-1800X-TE3-SS

  • TN

This equipment is a high-vacuum coater with three evaporation sources. The equipment adopts a front door type vacuum chamber design, which has a large chamber space and strong expandability, which can meet the evaporation coating of multi-style and large-size samples. The chamber is equipped with an upper sample stage, and the clamping or clamping sample mounting parts can be selected according to the user's sample style. The sample stage is rotatable, heated, and all operations are integrated through the touchscreen. The vacuum pump group of the equipment is a two-stage vacuum system, which consists of a bipolar rotary vane vacuum pump and a turbo molecular pump, which can provide a clean and oil-free high vacuum environment for vacuum coating experiments; the vacuum system contains a complete pneumatic valve system, users can One-button operation through the touch screen realizes operations such as vacuum extraction, non-stop sampling, and complete shutdown.

Detail intruduction:

There are three groups of evaporation sources in this equipment, which are tungsten boat evaporation sources and water-cooled copper electrodes, which can support a maximum current of 260A, and the heating temperature can reach up to 1800℃. It can realize the evaporation of various refractory metals. The three groups are independent Thermal evaporation source, will not cause mutual contamination of plating materials. The equipment adopts an integrated design, the cavity and the electric control part are separated left and right, which realizes the separation of water and electricity, and effectively ensures the safety of users. The electronic control part adopts the design of the combination of touch screen and button panel. Auxiliary functions such as vacuum system and sample stage are operated by one button on the touch screen, and power-on evaporation and film thickness control are operated independently through the panel, which is as convenient as possible for users at the same time. Avoid the possibility of misuse. The equipment has perfect design and excellent performance, and is a must-have for high-precision evaporation coating experiments in laboratories.

Application areas:

Metal and Dielectric Films

Manufacture of thin film sensors

Optical element

Nano and Microelectronics

Solar battery

Technical parameter:

Three Source High Vacuum Evaporation Coater

Sample stage

Size

Maximum   support φ150mm sample

Function

Rotatable,   heating up to 500°C

Evaporation   source

Quantity

Tungsten boat   x3

Power

Each   evaporation source is equipped with an independent power supply; three   evaporation sources have a total of three independent power supplies

Vacuum chamber

Cavity size

φ300x400mm

Observation   window

Front φ100mm

Cavity   material

304 stainless   steel

Open method

Front door

Film thickness   control (optional)

Crystal-type   film thickness measuring instrument, optional multi-channel film thickness   controller

Vacuum system

Foreline pump

Bipolar Rotary   Vane Pump

Exhaust port

KF16

Secondary pump

Turbomolecular   pump

Exhaust port

CF160

Vacuum   measurement

Resistance +   Ionization

Composite   vacuum gauge

Exhaust rate

Mechanical   pump 1.1L/s

Molecular pump   600L/s

Ultimate   vacuum

1.0E-5Pa

Power supply

AC 220V 50/60Hz

Pumping rate

Rotary vane   pump: 1.1L/S

Control System

PLC automatic   control

Operation   interface: touch screen + operation panel

(touch screen   controls deposition process and fast data entry; user friendly PLC software   system, can be updated via network)

Other

Supply voltage

AC380V,50Hz

Overall size

1000mm X 800mm   X 1500mm

Total power

5kW

Total Weight

350kg


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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