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High Vacuum Thermal Evaporation Coater Instrument with Level Sample Stage for Making Metal Contacts To Semiconductor Diodes

High Vacuum Thermal Evaporation Coater Instrument can be used to prepare various conductive films, semiconductor films, ferroelectric films, optical films, micro-nano device micro-processing, electron microscope sample pretreatment, etc.
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This equipment is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and electric lifting sample platform , can meet the evaporation  requirement of different samples and film materials; The lifting mechanism adopts welding bellows to seal, which can realize the lifting action of the sample platform under the condition of guaranteeing the sealing. The lifting and rotation of the sample platform can be controlled by the screen , the operation is simple and intuitive, which is very suitable for laboratory use.

High Vacuum Thermal Evaporation Coater Instrument can be used to prepare various conductive films, semiconductor films, ferroelectric films, optical films, micro-nano device micro-processing, electron microscope sample pretreatment, etc.

           Item

Detail

Supply   voltage

AC220V,60Hz

Maximum   power

800W

Sample   stage

Diameter   φ50mm;

Rotatable,   5rpm;

The   distance between the sample stage and the evaporation source is adjustable,   adjustment range 60mm-100mm

Quartz   chamber

O.Dφ180mm   x I.Dφ166mm x 235mm

Maximum   temperature

1700℃

Thermocouple

S   type thermocouple, working temperature 200℃ ~ 1500℃

Vacuum   gauge

Electronic   vacuum gauge

Vacuum   interface

KF16

Intake   interface

1/4NPS

Vacuum   pump

Double   stage rotary vane vacuum pump


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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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