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This equipment is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and electric lifting sample platform , can meet the evaporation requirement of different samples and film materials; The lifting mechanism adopts welding bellows to seal, which can realize the lifting action of the sample platform under the condition of guaranteeing the sealing. The lifting and rotation of the sample platform can be controlled by the screen , the operation is simple and intuitive, which is very suitable for laboratory use.
High Vacuum Thermal Evaporation Coater Instrument can be used to prepare various conductive films, semiconductor films, ferroelectric films, optical films, micro-nano device micro-processing, electron microscope sample pretreatment, etc.
Item | Detail |
Supply voltage | AC220V,60Hz |
Maximum power | 800W |
Sample stage | Diameter φ50mm; Rotatable, 5rpm; The distance between the sample stage and the evaporation source is adjustable, adjustment range 60mm-100mm |
Quartz chamber | O.Dφ180mm x I.Dφ166mm x 235mm |
Maximum temperature | 1700℃ |
Thermocouple | S type thermocouple, working temperature 200℃ ~ 1500℃ |
Vacuum gauge | Electronic vacuum gauge |
Vacuum interface | KF16 |
Intake interface | 1/4NPS |
Vacuum pump | Double stage rotary vane vacuum pump |
This equipment is a small desktop evaporation coater ,which is installed with tungsten basket evaporation source ,it can provide a maximum of 100A coating current,the maximum evaporating temperature up to 1800℃,and can meet the evaporation of a variety of common metal and part of non-metal. The vacuum chamber is made of stainless steel and has been degassed before delivery. It can reach the limit vacuum of 5x10-5Pa with the molecular pump group, which can meet the vacuum environment required by the evaporation of most materials; At the same time, the equipment adopts the design of high tank and electric lifting sample platform , can meet the evaporation requirement of different samples and film materials; The lifting mechanism adopts welding bellows to seal, which can realize the lifting action of the sample platform under the condition of guaranteeing the sealing. The lifting and rotation of the sample platform can be controlled by the screen , the operation is simple and intuitive, which is very suitable for laboratory use.
High Vacuum Thermal Evaporation Coater Instrument can be used to prepare various conductive films, semiconductor films, ferroelectric films, optical films, micro-nano device micro-processing, electron microscope sample pretreatment, etc.
Item | Detail |
Supply voltage | AC220V,60Hz |
Maximum power | 800W |
Sample stage | Diameter φ50mm; Rotatable, 5rpm; The distance between the sample stage and the evaporation source is adjustable, adjustment range 60mm-100mm |
Quartz chamber | O.Dφ180mm x I.Dφ166mm x 235mm |
Maximum temperature | 1700℃ |
Thermocouple | S type thermocouple, working temperature 200℃ ~ 1500℃ |
Vacuum gauge | Electronic vacuum gauge |
Vacuum interface | KF16 |
Intake interface | 1/4NPS |
Vacuum pump | Double stage rotary vane vacuum pump |