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TN-EVH300-III-HHH-SS
TN
The High Vacuum Thermal Evaporation Coater is a sophisticated piece of equipment designed for depositing thin films onto substrates with precision and efficiency. This coater utilizes a thermal evaporation process within a high vacuum environment to ensure uniform and high-quality film deposition.
Equipped with advanced technology, this coater is capable of depositing a wide range of materials onto various substrates, making it suitable for a variety of applications in industries such as electronics, optics, and research. The high vacuum environment ensures that the deposited films are free from impurities and defects, resulting in superior film quality.
With user-friendly controls and a robust design, the High Vacuum Thermal Evaporation Coater is easy to operate and maintain, making it an ideal choice for both research and production environments. Its high precision and reliability make it a valuable tool for achieving consistent and reproducible results in thin film deposition processes.
Overall, the High Vacuum Thermal Evaporation Coater is a versatile and efficient solution for depositing thin films in a high vacuum environment, making it an essential tool for researchers and manufacturers looking to achieve high-quality film coatings on their substrates.
Three Source High Vacuum Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensors,Optical element,Nano and Microelectronics,Solar battery
product name | Three Source High Vacuum Evaporation Coater | |
Product number | CY-EVH300-III-HHH-SS | |
Sample stage | Size | Maximum support φ150mm sample |
Function | Rotatable, heating up to 500°C | |
Evaporation source | Quantity | Tungsten boat x3 |
Power | Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies | |
Vacuum chamber | Cavity size | φ300x400mm |
Observation window | Front φ100mm | |
Cavity material | 304 stainless steel | |
Open method | Front door | |
Film thickness control (optional) | Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller | |
Vacuum system | Foreline pump | Bipolar Rotary Vane Pump |
Exhaust port | KF16 | |
Secondary pump | Turbomolecular pump | |
Exhaust port | ISO160 | |
Vacuum measurement | Resistance + Ionization Composite vacuum gauge | |
Exhaust rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Ultimate vacuum | 1.0E-5Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Rotary vane pump: 1.1L/S | |
Control System | PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network) | |
Other | Supply voltage | AC220V,50Hz |
Overall size | 1200mm X 900mm X 1650mm | |
Total power | 5kW | |
Total Weight | 500kg |
high vacuum thermal evaporation coater is a piece of equipment used for depositing thin films onto substrates through a thermal evaporation process in a high vacuum environment. Here are the primary purposes and applications of a high vacuum thermal evaporation coater:
Thin Film Deposition: The primary purpose of a high vacuum thermal evaporation coater is to deposit thin films of various materials, such as metals, semiconductors, and dielectrics, onto substrates. The process involves heating a material in a high vacuum until it evaporates and then condenses onto the substrate, forming a thin film.
Microelectronics and Semiconductor Fabrication: Thermal evaporation is used in the semiconductor industry to deposit metal contacts, adhesion layers, and other conductive films on semiconductor wafers. It is a key technique in the fabrication of microelectronic devices such as transistors, diodes, and integrated circuits.
Optical Coatings: The coater is widely used to apply optical coatings, including anti-reflective coatings, beam splitters, and mirrors, onto lenses, glass, and other optical components. The high vacuum environment ensures that the coatings are uniform, pure, and have the desired optical properties.
Metallic and Dielectric Coatings: High vacuum thermal evaporation is used to deposit both metallic films (such as gold, silver, aluminum) and dielectric films (such as silicon dioxide, titanium dioxide) for various applications, including reflective coatings, capacitors, and insulating layers.
Decorative Coatings: The coater is also used for decorative purposes, where thin metallic films are deposited onto consumer products like watches, jewelry, and electronic casings to give them a metallic finish or aesthetic appeal.
Research and Development: In research labs, thermal evaporation is a common method for preparing thin films for material science, physics, and nanotechnology research. The ability to control the thickness and uniformity of the film makes it a valuable tool for experimental studies and prototyping.
Fabrication of Organic and Inorganic Devices: Thermal evaporation is used in the fabrication of organic light-emitting diodes (OLEDs), thin-film transistors (TFTs), and other organic electronics. The technique is also employed in the production of inorganic thin-film devices like solar cells and sensors.
Nanotechnology Applications: In nanotechnology, thermal evaporation is used to deposit thin films for the fabrication of nanostructures and nanoscale devices. The high vacuum environment ensures that the deposition is clean and precise, which is crucial for nanoscale applications.
Barrier and Protective Coatings: The coater can be used to apply protective and barrier coatings on various substrates to enhance their durability, corrosion resistance, and other surface properties. These coatings are used in industries ranging from packaging to aerospace.
Overall, a high vacuum thermal evaporation coater is a versatile tool that plays a crucial role in various industries and research fields. It is valued for its ability to deposit high-purity, uniform thin films with precise control over thickness, making it essential for applications in microelectronics, optics, material science, and beyond.
The High Vacuum Thermal Evaporation Coater is a sophisticated piece of equipment designed for depositing thin films onto substrates with precision and efficiency. This coater utilizes a thermal evaporation process within a high vacuum environment to ensure uniform and high-quality film deposition.
Equipped with advanced technology, this coater is capable of depositing a wide range of materials onto various substrates, making it suitable for a variety of applications in industries such as electronics, optics, and research. The high vacuum environment ensures that the deposited films are free from impurities and defects, resulting in superior film quality.
With user-friendly controls and a robust design, the High Vacuum Thermal Evaporation Coater is easy to operate and maintain, making it an ideal choice for both research and production environments. Its high precision and reliability make it a valuable tool for achieving consistent and reproducible results in thin film deposition processes.
Overall, the High Vacuum Thermal Evaporation Coater is a versatile and efficient solution for depositing thin films in a high vacuum environment, making it an essential tool for researchers and manufacturers looking to achieve high-quality film coatings on their substrates.
Three Source High Vacuum Evaporation Coater Application areas:Metal and Dielectric Films,Manufacture of thin film sensors,Optical element,Nano and Microelectronics,Solar battery
product name | Three Source High Vacuum Evaporation Coater | |
Product number | CY-EVH300-III-HHH-SS | |
Sample stage | Size | Maximum support φ150mm sample |
Function | Rotatable, heating up to 500°C | |
Evaporation source | Quantity | Tungsten boat x3 |
Power | Each evaporation source is equipped with an independent power supply; three evaporation sources have a total of three independent power supplies | |
Vacuum chamber | Cavity size | φ300x400mm |
Observation window | Front φ100mm | |
Cavity material | 304 stainless steel | |
Open method | Front door | |
Film thickness control (optional) | Crystal-type film thickness measuring instrument, optional multi-channel film thickness controller | |
Vacuum system | Foreline pump | Bipolar Rotary Vane Pump |
Exhaust port | KF16 | |
Secondary pump | Turbomolecular pump | |
Exhaust port | ISO160 | |
Vacuum measurement | Resistance + Ionization Composite vacuum gauge | |
Exhaust rate | Mechanical pump 1.1L/s Molecular pump 600L/s | |
Ultimate vacuum | 1.0E-5Pa | |
Power supply | AC 220V 50/60Hz | |
Pumping rate | Rotary vane pump: 1.1L/S | |
Control System | PLC automatic control Operation interface: touch screen + operation panel (touch screen controls deposition process and fast data entry; user friendly PLC software system, can be updated via network) | |
Other | Supply voltage | AC220V,50Hz |
Overall size | 1200mm X 900mm X 1650mm | |
Total power | 5kW | |
Total Weight | 500kg |
high vacuum thermal evaporation coater is a piece of equipment used for depositing thin films onto substrates through a thermal evaporation process in a high vacuum environment. Here are the primary purposes and applications of a high vacuum thermal evaporation coater:
Thin Film Deposition: The primary purpose of a high vacuum thermal evaporation coater is to deposit thin films of various materials, such as metals, semiconductors, and dielectrics, onto substrates. The process involves heating a material in a high vacuum until it evaporates and then condenses onto the substrate, forming a thin film.
Microelectronics and Semiconductor Fabrication: Thermal evaporation is used in the semiconductor industry to deposit metal contacts, adhesion layers, and other conductive films on semiconductor wafers. It is a key technique in the fabrication of microelectronic devices such as transistors, diodes, and integrated circuits.
Optical Coatings: The coater is widely used to apply optical coatings, including anti-reflective coatings, beam splitters, and mirrors, onto lenses, glass, and other optical components. The high vacuum environment ensures that the coatings are uniform, pure, and have the desired optical properties.
Metallic and Dielectric Coatings: High vacuum thermal evaporation is used to deposit both metallic films (such as gold, silver, aluminum) and dielectric films (such as silicon dioxide, titanium dioxide) for various applications, including reflective coatings, capacitors, and insulating layers.
Decorative Coatings: The coater is also used for decorative purposes, where thin metallic films are deposited onto consumer products like watches, jewelry, and electronic casings to give them a metallic finish or aesthetic appeal.
Research and Development: In research labs, thermal evaporation is a common method for preparing thin films for material science, physics, and nanotechnology research. The ability to control the thickness and uniformity of the film makes it a valuable tool for experimental studies and prototyping.
Fabrication of Organic and Inorganic Devices: Thermal evaporation is used in the fabrication of organic light-emitting diodes (OLEDs), thin-film transistors (TFTs), and other organic electronics. The technique is also employed in the production of inorganic thin-film devices like solar cells and sensors.
Nanotechnology Applications: In nanotechnology, thermal evaporation is used to deposit thin films for the fabrication of nanostructures and nanoscale devices. The high vacuum environment ensures that the deposition is clean and precise, which is crucial for nanoscale applications.
Barrier and Protective Coatings: The coater can be used to apply protective and barrier coatings on various substrates to enhance their durability, corrosion resistance, and other surface properties. These coatings are used in industries ranging from packaging to aerospace.
Overall, a high vacuum thermal evaporation coater is a versatile tool that plays a crucial role in various industries and research fields. It is valued for its ability to deposit high-purity, uniform thin films with precise control over thickness, making it essential for applications in microelectronics, optics, material science, and beyond.