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High vacuum electron beam evaporation coating machine for optical film

high vacuum electron beam (e-beam) evaporation coating machine is a specialized piece of equipment used for depositing thin films onto various substrates using an electron beam to evaporate materials in a high vacuum environment
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  • TN-EBH500-SS

  • TN

The high vacuum electron beam (e-beam) evaporation coating machine is a sophisticated and specialized piece of equipment designed for depositing thin films onto a variety of substrates. This machine utilizes an electron beam to evaporate materials, creating a high-quality and uniform coating on the surface of the substrate.


With its advanced technology and precise control mechanisms, the high vacuum electron beam (e-beam) evaporation coating machine offers unparalleled accuracy and efficiency in the coating process. It is capable of depositing a wide range of materials, including metals, oxides, and semiconductors, onto substrates of various shapes and sizes.


This cutting-edge machine is ideal for applications in industries such as electronics, optics, and aerospace, where thin film coatings are essential for enhancing the performance and durability of products. Its high vacuum environment ensures a clean and contamination-free coating process, resulting in superior adhesion and film quality.


In addition, the high vacuum electron beam (e-beam) evaporation coating machine is equipped with advanced features such as real-time monitoring and control systems, allowing for precise adjustment of deposition parameters to achieve the desired coating thickness and properties. Its user-friendly interface makes it easy to operate and maintain, ensuring consistent and reliable performance.


Overall, the high vacuum electron beam (e-beam) evaporation coating machine is a valuable tool for researchers and manufacturers seeking to achieve high-quality thin film coatings with exceptional precision and repeatability. Its innovative design and advanced capabilities make it a top choice for demanding applications that require superior coating performance.

Technical parameters of electron beam evaporation coating:

Product name

Electron beam evaporation coating   mmachine

Product model

TN-EBH500-SS

Service condition

Ambient temperature ranged from 5 to 40℃

Source

Three phase 380V

Voltage

220V 50HZ

Power

<20 kW

Water gage

<2.5bar

Plated layer monitoring

Using SQM160 membrane thickness monitor,   the inhomogeneity of coating   thickness is less than 6%.

Heat lamp

Four halogen heating lamps were used for   degassing and one neon lamp   for lighting

The electrode interface

With a 2-way metal evaporation electrode   interface, backup

Water cooling system

Water pressure monitoring

Observation window

100mm in diameter, with X-ray filter   glass

Control system

Touch screen system

Vacuum chamber dimensions

Evaporation chamber dimensions: Φ 500 *   H500mm

Electron gun

New electronic gun, a 6-hole crucible

Sample turntable

Sample size: <150mm, the sample table   can rotate, the sample table   surface and the electron gun surface   distance adjustment up and down, the   adjustment distance is   200mm-250mm, the sample table can be heated, heating   temperature   <500℃.

System vacuum degree

A. Limit vacuum: baking for 12~24 hours,   continuous pumping, vacuum   less than 5x10-5Pa

B. Extraction rate: a vacuum <5x10 in   40 minutes, starting from the   atmosphere-4Pa

C. System leakage rate: after 12 hours of   shutdown, measure the vacuum   degree of the vacuum chamber is <10Pa

The vacuum unit

FB1200 Molecular pump + VRD-16 front   stage pump + side extraction valve   + gate valve + cut-off valve +   composite vacuum meter + coating monitoring   vacuum meter interface   (standby)

Electron beam evaporation coater video:

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Zhengzhou Tainuo Thin Film Materials Co., Ltd.
Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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