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5 inch proximity evaporation coater furnace for CdTe, sulfide and perovskite solar cells

5 inch proximity evaporation coating furnace is an ideal experimental tool for exploring the new generation of thin film solar cells, such as CdTe, sulfide and perovskite solar cells

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Model:
TN-1200X-RTP-II
Brand:
TN

Product Description

5 inch proximity evaporation coater furnace is a two heating zone rapid thermal processing furnace with 11" I.D.quartz tube. It is designed for PVD or CSS (Close Spaced Sublimation) film coating up to 3" diameter or 2"x2" square. The furnace is heated by two group of halogen heaters (Top and Bottom) separately with max. 20ºC/s heating rate. Two 30 segment precision temperature controllers are built in with +/-1ºC accuracy. RS485 port and control software are included to allow for the operation of furnace and temperature profile logging via PC. It is excellent tool to research new generation thin film for solar cell, such as CdTe, Sufide and Perovskite solar cell

Specification:

Furnace structure & Vacuum Chamber	Furnace, two temperature controllers, two channel gas flow meters are integrated into a mobile aluminum alloy frame The chamber is made of high purity fused quartz tube Quartz tube size: 11" OD/10.8" ID x 9" H The vacuum flanges are made of Stainless Steel 316
Vacuum Flanges	Top Flange with one KFD-25 vacuum port and one gas outlet (1/4" pipe required) can slide up or down manually to load and unload substrate and evaporated material easily Bottom flange has one KFD-25 vacuum port with one gas inlet (1/4" pipe required) with needle valves Flange is sealed by double silicone o-rings and can achieve max. vacuum pressure of 10E-2 Torr by a quality mechanical pump and 10E-5 Torr by molecular pump (vacuum pump is not included, please order separately) One digital vacuum gauge is installed on the top flange. Precision annti-corrosion digital vacuum gauge is optional at extra cost
Gas Flow Meters	Gas mixer integrated with two float-meters with adjustable measurement ranges of: 16 -160 mL/m 500 - 5000 mL/m (for purging purpose)
Heater and Sample Holder	Two independently controlled heaters with manually adjustable gap from 2 - 30 mm 20 pcs Halogen lamps are used as heating element for rapid thermal processing. Heaters are is made of stainless steel with water cold jacket to reduce heat radiation and allow for fast cooling. 5" dia. circular wafer holder is built into top heater for holding substrate. One set of high thermal-conductive AlN plates (5" Dia. x 0.5mm Thick) are included (place on the back of substrate to make it heat uniformly). A 16L/min recirculating water chiller is included for saving water source
Temperature Controller	Two precision digital temperature controllers with 30 segments programmable offer independent controlling of top and bottom heaters Each controller has PID auto tune function to protect heaters from overshooting and alarm function to avoid overheating and thermal couple broken
Working Temperature	Max. temperature for each heaters: <= 800ºC Max. temperature difference between two heaters: <= 300ºC depends on spacing between two heaters: Spacing 30mm Max. temp difference: 315ºC @ heating bottom only
Heating & Cooling Rate	Heating: > 8ºC/s ( heating single heater only ) Cooling: > 10ºC/s (600 - 100ºC) Max.
Thermal Couple	Two K-type thermal couples are installed on top and bottom heaters separately
Working Voltage	208 - 240VAC, single phase, 20A air breaker
Power Requirement	2200W total ( 1100W for each heater )
Warranty	One year limited with life time support
Dimensions	1085mm L x 680mm W x 1710mm H