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TN
Plasma Source for Multi-arc ion coater
Cavity | PBN(N2/H2)、Quartz(O2/H2) |
Flange | ICF114(CF63) |
Water cooling structure | Have |
Maximum power | 600W |
Occurrence frequency | 13.56MHz |
Gas inlet flange | ICF34(CF16) |
Plasma Source for Multi-arc ion coater
Cavity | PBN(N2/H2)、Quartz(O2/H2) |
Flange | ICF114(CF63) |
Water cooling structure | Have |
Maximum power | 600W |
Occurrence frequency | 13.56MHz |
Gas inlet flange | ICF34(CF16) |