| Quantity: | |
|---|---|
TN
Sample heating for thermal evaporation coaters
technical parameter:
Heating mode | Thermal radiation |
Heater | Ta wire、Ta piece、W wire、SiC |
Heating temperature | 1300（K） |
Thermal couple | K-type |
Substrate size | 1-4 inch |
UHV use | Yes |
Heating mode | Thermal radiation and electron bombardment heating |
Filament | W（diameter 0.05mm） |
Heating temperature | >2300（K） |
Low temperature cold head can be installed（Liquid nitrogen / Liquid helium） | Yes |
Minimum cooling | 10（K） |
Can the sample be biased | Yes |
Sample size | 1-inch |
UHV use | Yes |
Sample heating for thermal evaporation coaters
technical parameter:
Heating mode | Thermal radiation |
Heater | Ta wire、Ta piece、W wire、SiC |
Heating temperature | 1300（K） |
Thermal couple | K-type |
Substrate size | 1-4 inch |
UHV use | Yes |
Heating mode | Thermal radiation and electron bombardment heating |
Filament | W（diameter 0.05mm） |
Heating temperature | >2300（K） |
Low temperature cold head can be installed（Liquid nitrogen / Liquid helium） | Yes |
Minimum cooling | 10（K） |
Can the sample be biased | Yes |
Sample size | 1-inch |
UHV use | Yes |
