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Dual Anode X-Ray Source for Thermal Evaporation Coaters

Dual Anode X-Ray Source for Thermal Evaporation Coaters
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  • TN

Dual Anode X-Ray Source for Thermal Evaporation Coaters

Product Parameter:

Anode material

Al、Mg

Electron bombardment energy of Al target

15(keV)

Electron bombardment power of Al target

600(W)

Electron bombardment energy of Mg target

15 (keV)

Electron bombardment power of Mg target

400(W)

AlKα1/2 Ray energy (eV)

1486.6(Half   width 0.9eV)

MgKα1/2 Ray energy (eV)

1253.6(Half   width 0.7eV)

Flange

ICF70

Cooling water

>3.5l/min

Distance to sample

>14mm

Baking temperature

200℃

Aplication

XPS


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