TN
The source uses a permanent magnet to generate a divergent magnetic field with a large gradient along the axial direction near the anode, and under the action of the annular Hall current, the ions are accelerated along the axial direction to form an ion beam. Therefore, this source is often called a Hall ion source.
Product function:
1. Improve the bonding strength of the film layer:
2. Reduce absorption:
3. Improve the density of the film layer:
Features:
1. Low energy 2. High ion beam current density 3. Large uniform area 4. Ease of use 5. High cost-effectiveness.
Technical Parameters:
Discharge voltage | 100--200 (V) |
Discharge current | 0--3 (A) |
Applicable cabinet | Ø600 (mm,Max) |
The source uses a permanent magnet to generate a divergent magnetic field with a large gradient along the axial direction near the anode, and under the action of the annular Hall current, the ions are accelerated along the axial direction to form an ion beam. Therefore, this source is often called a Hall ion source.
Product function:
1. Improve the bonding strength of the film layer:
2. Reduce absorption:
3. Improve the density of the film layer:
Features:
1. Low energy 2. High ion beam current density 3. Large uniform area 4. Ease of use 5. High cost-effectiveness.
Technical Parameters:
Discharge voltage | 100--200 (V) |
Discharge current | 0--3 (A) |
Applicable cabinet | Ø600 (mm,Max) |
