TN
PLD 4-Axes Sample Stage
Product Parameter：
Drive object | Travel length | Type |
X | ±10.0mm | Manual or Motor controlled |
Y | ±10.0mm | Manual or Motor controlled |
Z | 0～100mm | Manual or Motor controlled |
Shaft in-plane rotation | Infinite，Adjustable speed | Manual or Motor controlled |
Substrate size | Φ20-60mm | |
Heating mode | SiC，Oxygen resistance | |
Heating temperature | >900℃，Temperature difference < 1℃ | |
Baffle | Alternative | |
Flange | ICF152（CF100） | |
PLD 4-Axes Sample Stage
Product Parameter：
Drive object | Travel length | Type |
X | ±10.0mm | Manual or Motor controlled |
Y | ±10.0mm | Manual or Motor controlled |
Z | 0～100mm | Manual or Motor controlled |
Shaft in-plane rotation | Infinite，Adjustable speed | Manual or Motor controlled |
Substrate size | Φ20-60mm | |
Heating mode | SiC，Oxygen resistance | |
Heating temperature | >900℃，Temperature difference < 1℃ | |
Baffle | Alternative | |
Flange | ICF152（CF100） | |
