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60KW Multi-function Coating Power Supply for vacuum coating magnetron sputtering

60KW Multi-function Coating Power Supply for vacuum coating magnetron sputtering
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  • TN

The multi-function coating power supply is based on plasma application technology, a multi-function multi-purpose power supply developed for vacuum coating technology with rapid response, adjustable current and continuous steady current, multi-level voltage adaptive output, output power 60kW, short-circuit current 100A.

Multifunctional coating power supply is suitable for vacuum coating, magnetron sputtering, plasma application, plasma surface treatment, plasma heating, plasma sintering, plasma heat treatment, plasma thermal processing, plasma synthesis, chemical ultrafine purification, gas discharge Light source, magnetic fluid power generation, superconducting magnetic field, plasma shielding, constant torque electric drive and other electrical industries.

It is a multi-function power supply that combines multiple functions such as magnetron sputtering power supply, multi-arc power supply, fast switching power supply, high-power stable pulse power supply, intermediate frequency current, bias power supply and so on.

Key technical features: Even if there is an instant short-circuit during operation, the short-circuit current can still output continuously and stably to ensure the coating effect.

Technical parameters:

Input   voltage

AC   380±10%V   (three-phase five-wire)

Output   Power

60KW

Working   current

0-100A

Operating   voltage

DC   20~1000V

Frequency

80kHz

Working   mode

Adaptive   constant voltage, custom constant current

Control   mode

Power   panel button control

External   control

DB9   interface control (analog or digital interface optional)

TTL   interface control

High   level (5±2V), low   level 0~2V

Display   method

Chinese   and English LCD display (customizable)

Display   content

Working   status, output voltage, output current, set value.

Input   protection

Input   overvoltage, input undervoltage, input overcurrent, phase loss

Output   protection

Output   overvoltage, output overcurrent, output offset

Safety   protection

Grounding   protection, leakage protection, external control protection, lightning   protection, overheating

Insulation   class

Class   B

Protection   level

IP20

Protection   response time

1uS

Ambient   temperature

-5~45℃

Humidity

≤85%

Cooling   method

Air   cooling


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Which is a manufacturer specializing in the production of laboratory scientific instruments. Our products are widely used in colleges, research institutions and laboratories.

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