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TN
The solid-state RF generator, adpots the latest technology of power amplifier and DCmodule, which promise the generator with a stable RF power ouput and long service life.
The RF generator automatic matching unit adpots the most advanced digital network macthing platform. It can match the complex impedeance of the plasma with your turning-range in a fast, accurate and repeatble way.
Compared to the traditional analog tuning methods, digital tuning lagorithms and stepper motor drivers produce faster, more accuratena dhighly repeatable responses that always match with the impedance point of the load.
High quality and low quantity components maximize the RF generator reliability and long service life.
LCD display and it can be used directly on the control panel, improve the efficiency and training cost.
Model | AGM-1303 |
Output power | 5W-300W |
Max.reflected power | 100W |
Power accurancy | ±0.1% |
harmonic component | ≤-50dbc |
Power Supply | Single phase187V-253V, 50/60HZ |
overall efficiency | ≥70% |
power factor | ≥90% |
Max. Match trasmit power | 500w |
Reflectedpower(Max. power) | <3w |
Max. load current | 30ARMS |
Max. load voltage | 7500VRMS |
RF output connector | 50 Ω, L29,customizable |
Match time | 1~3s |
Matchable impedance real part range | 0~80Ω |
Matchable impedance imaginary part range | ﹣200j~ ﹢200j |
Cooling Type |
force-air cooling |
Total Weight | 19.5kg |
Overall size | 133 mm (H)×440 mm (W)×410 mm (D) |
The solid-state RF generator, adpots the latest technology of power amplifier and DCmodule, which promise the generator with a stable RF power ouput and long service life.
The RF generator automatic matching unit adpots the most advanced digital network macthing platform. It can match the complex impedeance of the plasma with your turning-range in a fast, accurate and repeatble way.
Compared to the traditional analog tuning methods, digital tuning lagorithms and stepper motor drivers produce faster, more accuratena dhighly repeatable responses that always match with the impedance point of the load.
High quality and low quantity components maximize the RF generator reliability and long service life.
LCD display and it can be used directly on the control panel, improve the efficiency and training cost.
Model | AGM-1303 |
Output power | 5W-300W |
Max.reflected power | 100W |
Power accurancy | ±0.1% |
harmonic component | ≤-50dbc |
Power Supply | Single phase187V-253V, 50/60HZ |
overall efficiency | ≥70% |
power factor | ≥90% |
Max. Match trasmit power | 500w |
Reflectedpower(Max. power) | <3w |
Max. load current | 30ARMS |
Max. load voltage | 7500VRMS |
RF output connector | 50 Ω, L29,customizable |
Match time | 1~3s |
Matchable impedance real part range | 0~80Ω |
Matchable impedance imaginary part range | ﹣200j~ ﹢200j |
Cooling Type |
force-air cooling |
Total Weight | 19.5kg |
Overall size | 133 mm (H)×440 mm (W)×410 mm (D) |
