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TN-FDC-S
TN
TN-FDC-S film thickness controller is suitable for electron beam coating, magnetron sputtering, resistance thermal evaporation and other coating thickness control occasions.
It forms closed-loop control with evaporation source to control and display complete coating data in real time, including power, speed, thickness and time used. Complex optical and metal multilayer films can be plated. Various operations can be realized through touch screen control, which is more intuitive and understandable than traditional key operation.
Instrument programming is very convenient, a total of 8 film systems can be set, each film system has 100 layers of coating layer, which brings you great convenience in multi-layer coating.
TN-FDC-S film thickness controller has the following special functions:Manual control: manual termination of coating, coating according to the current power in case of crystal vibration failure, switching of wafer to continue (multi chip probe), interruption of film system, simultaneous pre melting of two sources, password protection, etc.
Technical features
1. Full touch screen operation, simple and easy to use;
2. 32 film systems, each with 50 / 100 layers of automatic coating;
3. 12 signal inputs;12 switch outputs;
4. Provide full-automatic, semi-automatic and manual control modes;
5. Two sources can be controlled, one working and the other pre dissolving;
Technical parameters
Crystal frequency | 6MHz (optional 2.5M 3M 5M 9M crystal) |
Display mode | 5 "color touch screen + nixie tube display speed and real thickness |
Operation mode | Touch screen |
Final thickness | 00μ0000Å-99μ9999Å |
Thickness display resolution | 1Å/s |
Rate display resolution | 0.1Å/s |
Number of coating layers | 32 film system, 50 / 100 layers per film system; |
Number of probes | A B |
Instrumental factor | 0.01-99.99 |
Time display | 00:00:00-23:59:59 H:M:S |
Power display | 0～99.9% |
Premelting power | 0～99% |
Pre plating power | 0～99.9% |
Pre melting time / pre plating time | 0～99:99 m:s |
Pre melting and holding time /Pre plating holding time | 0～99:99 m:s |
Coating rate (set rate) | 0～999.9Å/s |
Material storage | 257 + 10 customized |
Communication | RS232/RS485 |
Controllable evaporation source | 2, one for operation and the other for pre dissolution |
Output control | ±10V/5V/2.5V |
I / interface | 12 signal inputs / 12 switch outputs |
Number of controllable crucibles | 1-16 |
Coating display | Rate curve / value |
Coating circuit times | 50 / 100 layers per membrane system |
Size | 480 × 280 × 89mm (2U 19 "case) |
Special features:
1. Manual, semi-automatic, automatic three kinds of coating mode, to meet a variety of coating machine configuration;
2. Manual stop coating: manual stop coating in the coating process;
3. Manual control: determine the initial coating process requirements;
4. Interrupting film system: in case of problems or faults found in automatic and semi-automatic coating, the coating can be stopped and the current state can be saved automatically. After the faults are cleared, the coating can be continued from interrupting film system;
5. When automatic or semi-automatic coating, if crystal vibration fails, you can choose to stop coating, coating according to the current power time, switch chip to continue (multi chip probe);
6. Two sources are premelted at the same time: in the beginning process of current coating, the second layer can be premelted at the same time, so as to meet the situation of tight time requirements;
7. Password protection: the function of password protection for film system and film parameters to protect process parameters from being modified by non process personnel;
8. Coating data recording: when automatic or semi-automatic coating, the system can record the film forming time and final thickness rate parameters of each layer of film.
TN-FDC-S film thickness controller is suitable for electron beam coating, magnetron sputtering, resistance thermal evaporation and other coating thickness control occasions.
It forms closed-loop control with evaporation source to control and display complete coating data in real time, including power, speed, thickness and time used. Complex optical and metal multilayer films can be plated. Various operations can be realized through touch screen control, which is more intuitive and understandable than traditional key operation.
Instrument programming is very convenient, a total of 8 film systems can be set, each film system has 100 layers of coating layer, which brings you great convenience in multi-layer coating.
TN-FDC-S film thickness controller has the following special functions:Manual control: manual termination of coating, coating according to the current power in case of crystal vibration failure, switching of wafer to continue (multi chip probe), interruption of film system, simultaneous pre melting of two sources, password protection, etc.
Technical features
1. Full touch screen operation, simple and easy to use;
2. 32 film systems, each with 50 / 100 layers of automatic coating;
3. 12 signal inputs;12 switch outputs;
4. Provide full-automatic, semi-automatic and manual control modes;
5. Two sources can be controlled, one working and the other pre dissolving;
Technical parameters
Crystal frequency | 6MHz (optional 2.5M 3M 5M 9M crystal) |
Display mode | 5 "color touch screen + nixie tube display speed and real thickness |
Operation mode | Touch screen |
Final thickness | 00μ0000Å-99μ9999Å |
Thickness display resolution | 1Å/s |
Rate display resolution | 0.1Å/s |
Number of coating layers | 32 film system, 50 / 100 layers per film system; |
Number of probes | A B |
Instrumental factor | 0.01-99.99 |
Time display | 00:00:00-23:59:59 H:M:S |
Power display | 0～99.9% |
Premelting power | 0～99% |
Pre plating power | 0～99.9% |
Pre melting time / pre plating time | 0～99:99 m:s |
Pre melting and holding time /Pre plating holding time | 0～99:99 m:s |
Coating rate (set rate) | 0～999.9Å/s |
Material storage | 257 + 10 customized |
Communication | RS232/RS485 |
Controllable evaporation source | 2, one for operation and the other for pre dissolution |
Output control | ±10V/5V/2.5V |
I / interface | 12 signal inputs / 12 switch outputs |
Number of controllable crucibles | 1-16 |
Coating display | Rate curve / value |
Coating circuit times | 50 / 100 layers per membrane system |
Size | 480 × 280 × 89mm (2U 19 "case) |
Special features:
1. Manual, semi-automatic, automatic three kinds of coating mode, to meet a variety of coating machine configuration;
2. Manual stop coating: manual stop coating in the coating process;
3. Manual control: determine the initial coating process requirements;
4. Interrupting film system: in case of problems or faults found in automatic and semi-automatic coating, the coating can be stopped and the current state can be saved automatically. After the faults are cleared, the coating can be continued from interrupting film system;
5. When automatic or semi-automatic coating, if crystal vibration fails, you can choose to stop coating, coating according to the current power time, switch chip to continue (multi chip probe);
6. Two sources are premelted at the same time: in the beginning process of current coating, the second layer can be premelted at the same time, so as to meet the situation of tight time requirements;
7. Password protection: the function of password protection for film system and film parameters to protect process parameters from being modified by non process personnel;
8. Coating data recording: when automatic or semi-automatic coating, the system can record the film forming time and final thickness rate parameters of each layer of film.
